Bach Resistor Ceramics GmbH

Seefeld, 
Germany
http://www.bachrc.de
  • 小間番号2524


Welcome to Bach RC, Your specialist for ceramic heaters.

Bach Resistor Ceramics, located in Seefeld, Germany, manufactures ceramic heating elements of silicon nitride and aluminum nitride. The fully ceramic heating elements are constructed of an electrically insulating ceramic that is sintered homogeneously with the ceramic heating conductor. High performance ceramics enable superior strength and heat conductivity. The heaters can be as small as 3x3mm and as large as Ø480mm diameter. Their maximum temperature is 1000°C. Ceramic heaters can be designed to customer requirements, directing the heat where it is needed.


 出展製品

  • Hotplates and Wafer Heaters
    Ceramic Hot Plates and Wafer Heaters of silicon nitride can be used in many Front End and Back End Processes. The outstanding flatness, temperature uniformity and durability enable an superior performance....

  • Description

    Ceramic hot plates made of silicon nitride can be produced with an outer diameter of 400 mm. Within this diameter any rectangular shapes, customized shapes and openings are possible. A typical height of the plates is 5 mm and with an integrated cooling channel about 15 mm. The special properties and low mass of the ceramic material allow fast heating rates, uniform temperature distribution and outstanding precision in control. In comparison to metal the surface of ceramic stays flat due to its low thermal expansion even when operated with fast changes in temperature. The high strength of hot-pressed silicon nitride guarantees high stress resistance (e. g. with high pressure loads) and excellent wear resistance. The hot plates are very suitable for demanding processes in semiconductor processing systems.


    Customized design

    Our in-house designs make any modification in size, configuration, or performance simple and convenient. Mounting-bracket holes and bores for temperature sensors can be added to the design. Laser-cut vacuum grooves can be added as well. Our hot plates come already flat ground, however they can be ground further up to a flatness of < 10 μm to meet specific requirements. Furthermore, our ceramic heating conductor with its customized design allows the integration of several heating zones. Devices to compensate for heat loss and an internal test lead for temperature measurement can be easily built in. For operating in high vacuum at up to 1 000 °C a pin contact can be supplied. In several customer projects we integrated a cooling function which can be produced by a cooling module with integrated channels. This cooling module is brazed high vacuum tight to the heater. Cooling is effected by compressed air or nitrogen.

    Advantages

    Your advantages:

    • You have superior temperature uniformity and flatness of the hotplate
    • Integrated active cooling and vacuum chucking upon request
    • The heating and cooling function can be adapted to your process requirements

    Areas of application

    • semiconductor processing systems (e. g. die bonders)
    • coating systems (CVD, PVD)
    • soldering systems
    • vacuum technology
    • annealing / etching processes
    • lithography
  • Miniature and Fast Ramp Rate Heaters
    Our ceramic heaters are made of silicon nitride ceramics and perform fast heat ramps up to 150 C/sec. The maximum temperature can be up to 1000C in air or vacuum....

  • Chip heaters


    Description

    Chip heaters made of silicon nitride are normally rectangular. Various dimensions and batch sizes up to our die diameter of 400 mm can be produced. The special properties and the low mass of ceramic allow fast heating rates, a uniform temperature distribution and high control accuracy. Small heating elements can be operated controlled with very high surface power at short cycle times. In comparison to metal the surface of ceramic stays very smooth due to its low thermal expansion even when operated with changes in temperature. The high strength of hot-pressed silicon nitride guarantees high stress resistance (e. g. with high pressure loads) and excellent wear resistance. We provide miniature heaters for operating in the open air at temperatures up to 500 °C and heaters with a cold area at temperatures up to 1 000 °C.


    Customized design

    Our in-house designs make any modification in size, configuration, or performance simple and convenient. Mounting-bracket holes and bores for temperature sensors or suction pipes can be included. Laser-cut vacuum grooves can be added as well. Our chip heaters come already flat ground, however they can be ground further up to a flatness of < 10 μm to meet specific requirements. A variety of shapes formed to the contour of the element to be heated are possible as well. They can be produced as a point (point heaters) or as protruding flat. Thus heated areas with a size of < 1 mm2 are possible. Miniature heaters can be converted to be operated on low voltage

    Advantages

    Your advantages:

    • You can generate the heat exactly at the spot where it is needed
    • Fast heating rates reduce processing time and increase Your yield through shorter cycle times
    • The inert and chemically resistant ceramic material avoids any contamination of your system
    • High specific power up to 150 W/cm2

    Areas of application

    • semiconductor processing systems (e. g. die bonders)
    • handling of components, assembly of printed circuit boards (PCBs)
    • soldering systems and desoldering equipment
    • nozzle heaters
    • packaging machines (e. g. point-by-point welding)
    • medical technology
    • machine-building
    • tool heating