Pall is the global leader in filtration
Nihon Pall's Microelectronic Division provides filter devices to clean and control the quality of the process fluid and ensure high product yield in semiconductor manufacturing.
By filtering and purifying chemical, water and gas streams, Pall enables semiconductor manufacturers to remove nanoparticles that can have a devastating impact on sensitive products and equipment.
New products at the exhibition include a high flow performance 5nm filter specifically designed for high temperature SPM applications. A new Nylon Extension product for lithography processes to reduce process defect, and a nanometer grade filter for CMP processes.