The dual-layer design of the box provides high-efficiency protection for the transportation and storage of 6-inch EUV reticles between process stations.
The inner EIP can be operated in a vacuum environment.
Supports purge function to control the temperature and humidity of the micro-environment inside the reticle carrier box.
Size: 6 x 6 x 0.25 (in.)
Material: PEEK (ESD), Metal
Usage: Support purge function
Application: Suitable for EUV process (ASML Certification)