Axcelis Technologies

Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications. The flexibility of the platform enables us to tailor Purion H to the specific energy or dosing requirements of your application. The Purion H offers unmatched versatility, throughput and uniformity, so you can achieve greater yield with the lowest cost of ownership.

The Purion high current products are built from three device enabling Purion lines:

• Purion H—covering traditional energy and dose application space.  For general high current applications.
• Purion Dragon—a high performance platform that excels in Purity, Precision and Productivity.  Targeted for leading-edge applications, especially in low energy high dose.  
• Purion H200—the newest product line in the Purion Platform.  Purion H200 offers high energy, high current capability targeting the power device market.

The Purion high current product line offers unmatched Purity, Precision and Productivity, so you can achieve greater yield with the lowest cost of ownership.

Our Purion XE series of ion implanters have rapidly earned a reputation as the industry standard for today’s demanding high energy recipes. Their unique RF Linear Accelerator (LINAC) technology offers higher reliability, a wider energy range and greater productivity than competing platforms, with superior metals contamination control.

The Purion High Energy Series includes a variety of implanters, allowing you to select the optimal energy level for your application:

• Purion XE—12-stage LINAC with energies up to 4.5 MeV
• Purion EXE—12-stage LINAC with higher energy than Purion XE up to 5.25 MeV
• Purion VXE—14-stage LINAC with energy booster, delivering energies up to 8 MeV
• Purion XEmax—Dual LINAC design with patented Boost Technology^TM for the highest energies up to 15 MeV
• Purion XE Power Series—XE and EXE models designed for high volume power devices aluminum implantation, 150mm SiC wafer handling or 200mm thin Si wafer handling

The Company’s Purion Power Series was designed to meet the growing market demand for the power device market. The Purion Power Series was developed with enabling technology to specifically address the unique needs of emerging power device applications.  This includes the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si and SiC, along with its precision wafer temperature control technology, all accomplished while delivering the industry’s highest throughput and capital efficiency. The product line includes the Purion M Power Series™ for medium current, the Purion H Power Series™ and Purion H200 Power Series™ for high current and the Purion XE Power Series™ for high energy.