Wide application coverage from ultra high resolution to high current high speed writing
• Inherits traditional Elionix technology
150kV/125kV if the ultra-fine patterns are most important.
100 kV for common equipment and wide variety of requirements
50 kV for high speed writing for the production.
It can meets user's several requirements.
• Available in 8" and 12" chambers
The first full 12" writing area on the market and the first lineup. From a small piece size commonly used in basic research, Compatible with 2/3/4/5/6/7/8/12 inch wafers.
Masks such as the 6025 and 9025 mask are also available.
• Full lineup of automatic loading system
Single cassette autoloader, which is especially for research and development applications
Multiple cassette autoloader for small to medium volume production
Full lineup of robot laoding system