KSM

渋谷区,  東京都 
Japan
http://www.ksm.co.kr

• 小間番号4403

「KSMは共に世界最高を志す」 世界トップシェアーの溶接ベローズをご提供します

ケーエスエムジャパン(株)

弊社は40年以上超高真空及び半導体製造装置用の重要真空機密部品やヒーターをカスタマイズ設計、製造しており、海外の主要半導体装置メーカの戦略的OEMサプライヤーとして協力しております。

• 溶接金属ベローズ
• Pedestal Heaters (SST, Aluminum, Ceramic)
• SiC Fine Ceramics (Silicon Carbide)
• Mechanical Seals/ロータリージョイント

海外の主要半導体OEM装置メーカの戦略的なサプライヤとして、半導体市場やFPD、太陽電池市場の活況により急増する需要を独自に管理する自社製造拠点のクリールームの製造キャパを生かして柔軟に対応しております。溶接部品及び金属加工品の製造現場として世界最大のクリールーム規模を保有しており、自社内の一貫製造や自動化洗浄システム、金属検証研究設備を備え付けております。

溶接ベローズを含む弊社の上位アセンブリー製品は薄膜から最終検査パッケージに至るウエハ加工工程の各段階に必要な精密部品であり、高レベルの真空環境や高温使用にも採用されています。

PROCESS: Crystal Growing | Ion Implant | Etch | CVD | MBE | CMP | Lithography | Inspection | Display + …

APPLICATION: Flexible Coupling | Crucible Lifts | Feedthrough | Flex-Connector | Pin Lift | Cassette Elevator | Door Valve Loadlock | Vibration Damper +…

 プレスリリース

• The World's No. 1 Metal Bellows Technology(20210909) (20221102)

  • KSM, whose original entity name stood as an acrynmn for 'KOREA SEAL MASTER'- has grown eponentially over it's years in business. At it's core KSM is fundementally an engineering company- passionate about supplying innovative Sealing & Heating solutions to those spearheading the future of high-tech and all things wafer manufacturing.  

    Over the years, KSM's unique and continually expanding product line has kept them at the forefront of materials research innovation. Their experience supporting cutting-edge builds and cross-market applications put them at particular advantage to leverage their joint HEATING & WELDING know-how with their METAL and CERAMICs materials aptitude. It is the cocktail of these capabilities that continue to drive the entire KSM Group forward- running faithfully hand-in-hand with the most recognized names in the WFE Market.

    In light of SEMICON Korea 2019 The Elec, a South Korean Media Group- published the following piece on KSM Co., Ltd.

    ***  ARTICLE TEXT BELOW:

    KSM Group participated in Semicon Korea 2019 to exhibit innovative semiconductor equipment parts and components. Among the affiliates, KSM exhibited Metal Bellows, KSM Component exhibited heater parts, and Korea Seal Master exhibited Mechanical Seal.
    
    The metal bellows, which is the main source of sales of KSM Group, refers to a structure formed by forming and welding a thin sheet of 0.05mm thickness into a flexible corrugated tube. This structure is used to keep both the inside and outside of the semiconductor equipment in a vacuum sealed state. Since the semiconductor wafer is moved and processed in the equipment, metal bellows are required to distinguish between the atmospheric state and the vacuum state.
    
    The metal bellows should be able to move, compress, and stretch, and be used for more than one million cycles in high temperature, high pressure, and corrosive environments. KSM metal bellows is a part that global semiconductor equipment companies compete to get their hands on. Korean equipment parts companies rarely have a U.S. subsidiary and factories; KSM does.
    
    "KSM has the world's largest market share in the metal bellows market," said Jeong-il Kim, Executive Director of KSM. "With our proprietary automated welding robot technology, we can produce more high-quality and high-durability products than any other metal bellows company in the world,” he emphasized.
    
    The heater is the new growth engine of the KSM group. This product is used as a key component of chemical vapor deposition (CVD) and etching process equipment among semiconductor manufacturing equipment. The heater must be able to heat uniformly over the entire wafer area while maintaining direct contact with the silicon wafer and maintaining a minimum temperature deviation. KSM Component brazes or welds the metal with an automated system. In the case of welding, thermal deformation is small because it utilizes E beams. High productivity is the greatest competitive advantage. The development period is shortened to two weeks so that it can respond quickly to customer requests.
    
    Korean Seal Master presented Kalrez O-ring, a sealing product. Kalrez is made of high fluorine content and thus has higher chemical and thermal resistance than existing materials. It is applied to semiconductor and display vacuum equipment.

    Find Article: http://www.thelec.net/news/articleView.html?idxno=166

• The World's No. 1 Metal Bellows Technology(20210909) (20221107)

  • KSM, whose original entity name stood as an acrynmn for 'KOREA SEAL MASTER'- has grown eponentially over it's years in business. At it's core KSM is fundementally an engineering company- passionate about supplying innovative Sealing & Heating solutions to those spearheading the future of high-tech and all things wafer manufacturing.  

    Over the years, KSM's unique and continually expanding product line has kept them at the forefront of materials research innovation. Their experience supporting cutting-edge builds and cross-market applications put them at particular advantage to leverage their joint HEATING & WELDING know-how with their METAL and CERAMICs materials aptitude. It is the cocktail of these capabilities that continue to drive the entire KSM Group forward- running faithfully hand-in-hand with the most recognized names in the WFE Market.

    In light of SEMICON Korea 2019 The Elec, a South Korean Media Group- published the following piece on KSM Co., Ltd.

    ***  ARTICLE TEXT BELOW:

    KSM Group participated in Semicon Korea 2019 to exhibit innovative semiconductor equipment parts and components. Among the affiliates, KSM exhibited Metal Bellows, KSM Component exhibited heater parts, and Korea Seal Master exhibited Mechanical Seal.
    
    The metal bellows, which is the main source of sales of KSM Group, refers to a structure formed by forming and welding a thin sheet of 0.05mm thickness into a flexible corrugated tube. This structure is used to keep both the inside and outside of the semiconductor equipment in a vacuum sealed state. Since the semiconductor wafer is moved and processed in the equipment, metal bellows are required to distinguish between the atmospheric state and the vacuum state.
    
    The metal bellows should be able to move, compress, and stretch, and be used for more than one million cycles in high temperature, high pressure, and corrosive environments. KSM metal bellows is a part that global semiconductor equipment companies compete to get their hands on. Korean equipment parts companies rarely have a U.S. subsidiary and factories; KSM does.
    
    "KSM has the world's largest market share in the metal bellows market," said Jeong-il Kim, Executive Director of KSM. "With our proprietary automated welding robot technology, we can produce more high-quality and high-durability products than any other metal bellows company in the world,” he emphasized.
    
    The heater is the new growth engine of the KSM group. This product is used as a key component of chemical vapor deposition (CVD) and etching process equipment among semiconductor manufacturing equipment. The heater must be able to heat uniformly over the entire wafer area while maintaining direct contact with the silicon wafer and maintaining a minimum temperature deviation. KSM Component brazes or welds the metal with an automated system. In the case of welding, thermal deformation is small because it utilizes E beams. High productivity is the greatest competitive advantage. The development period is shortened to two weeks so that it can respond quickly to customer requests.
    
    Korean Seal Master presented Kalrez O-ring, a sealing product. Kalrez is made of high fluorine content and thus has higher chemical and thermal resistance than existing materials. It is applied to semiconductor and display vacuum equipment.

    Find Article: http://www.thelec.net/news/articleView.html?idxno=166

 出展製品