TSI

Shoreview,  MN 
United States
https://tsi.com/msp/
  • 小間番号3832


MSP, a Division of TSI®, greets you at SEMICON Japan 2023!

Welcome to MSP at SEMICON Japan 2023!

We proudly showcase our pioneering solutions in semiconductor production.

New Turbo II™ Vaporizers: Twice the Output, Half the Size

Discover our next generation of elite vaporization products for gas-phase processing in CVD and ALD:

  • MSP Turbo II™ Vaporizers: Merging advanced droplet vaporization and direct liquid injection, we guarantee precision and uniformity.
  • Excellence in Thin Films: With MSP Turbo II™ Vaporizers, achieve peak wafer yields and top-tier thin-film quality.
  • Vapor/Gas Filters: Built for low-pressure and high-temperature settings, these filters boast formidable chemical and thermal resistance.
  • Liquid Flow Controllers: Ideal for PE vaporizers and ALD, ensuring optimal liquid flow.

Surface Defect Inspection & Metrology

MSP sets the standard in particle deposition, with unparalleled equipment, services, and suspensions:

  • 2300G3 Particle Deposition System: The gold standard in wafer inspection and metrology, raising the bar for device yield.
  • Certified Wafer & Reticle Standards: Enhance calibration and system monitoring with our trusted contamination standards.
  • Particle Size Standards: Reliable calibration tools for surface scanning equipment or particle counters.

With MSP, you're assured of top-notch vaporization solutions and cutting-edge technology to cover your comprehensive particle and calibration needs.

Explore our booth and see how our innovations are influencing the development of the industry. Join us in envisioning the future at SEMICON Japan 2023.

MSP Website

 プレスリリース

  • (20231113)

 出展製品

  • Low-Flow Turbo II Vaporizer 2852NP
    MSP's Turbo II™ Vaporizer 2852NP is designed for applications that require low to mid vapor flow rates....

    • Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2852NP provides stable vapor concentrations while maintaining a very small footprint. The 2852NP also has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.

    Dimensions (HxWxD)

    198 mm x 79 mm x 114 mm (7.8 inch x 3.1 inch x 4.5 inch)
    Weight 2.5 kg (5.6 lb)
    Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
    Liquid Inlet 1/8 in. VCR female
    Vapor Outlet 1/4 in. VCR female split nut
    Compressed Air 4 mm instant tube fitting
    Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
    Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
    Heater Power Requirements1 208 VAC, 60 Hz, 450 W
    Carrier Gas Inert gas recommended
    Max Carrier Gas Flow1 2.0 standard liters/min N2 @ 50 psig
    Max Liquid Flow2 7 g/min (TEOS or equivalent)
    System Pressure Limit 150 psig
    Compressed Air 90 to 110 psig
    Temperature Range3 40°C to 180°C
    Temperature Sensor 2 type Ƙ thermocouples

    Specifications subject to change without notice.

    1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
    2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.
    3 Appropriate venting is required.

  • Low-Flow Turbo II Vaporizer 2852PE
    MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates....

    • Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations while maintaining a very small footprint. The 2852PE also features an on-board flow control valve for extremely fast flow-rate response.

    Dimensions (HxWxD)

    198 mm x 79 mm x 114 mm (7.8 inch x 3.1 inch x 4.5 inch)
    Weight 2.5 kg (5.6 lb)
    Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
    Liquid Inlet 1/8 in. VCR female
    Vapor Outlet 1/4 in. VCR female split nut
    Compressed Air 4 mm instant tube fitting
    Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
    Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
    Heater Power Requirements1 208 VAC, 60 Hz, 450 W
    Carrier Gas Inert gas recommended
    Max Carrier Gas Flow1 2.0 standard liters/min N2 @ 50 psig
    Max Liquid Flow2 7 g/min (TEOS or equivalent)
    System Pressure Limit 150 psig
    Compressed Air 90 to 110 psig
    Temperature Range3 40°C to 180°C
    Temperature Sensor 2 type Ƙ thermocouples

    Specifications subject to change without notice.

    1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
    2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.
    3 Appropriate venting is required.

  • High-Flow Turbo II Vaporizer 2855NP
    MSP's Turbo II™ Vaporizer 2855NP is designed for applications that require mid to high vapor flow rates....

    • Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855NP delivers twice the vapor output in a footprint that is half the size. The 2855NP has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.

    Dimensions (HxWxD)

    249 mm x 79 mm x 142 mm (9.8 inch x 3.1 inch x 5.6 inch )
    Weight 5.1 kg (11.2 lb)
    Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
    Liquid Inlet 1/8 in. VCR female
    Vapor Outlet 1/2 in. VCR female
    Compressed Air 4 mm instant tube fitting
    Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
    Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
    Heater Power Requirements1 208 VAC, 60 Hz, 900 W
    Carrier Gas Inert gas recommended
    Max Carrier Gas Flow1 10 standard liters/min N2 @ 50 psig
    Max Liquid Flow2

    40 g/min (TEOS or equivalent)
    System Pressure Limit 150 psig
    Compressed Air 90 to 110 psig
    Temperature Range3 40°C to 200°C
    Temperature Sensor 2 type Ƙ thermocouples

    Specifications subject to change without notice.

    1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information
    2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.
    3 Appropriate venting is required.

  • High-Flow Turbo II Vaporizer 2855PE
    MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates....

    • Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size.

    Dimensions (HxWxD)

    249 mm x 79 mm x 142 mm (9.8 inch x 3.1 inch x 5.6 inch)
    Weight 5.1 kg (11.2 lb)
    Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
    Liquid Inlet 1/8 in. VCR female
    Vapor Outlet 1/4 in. VCR female
    Compressed Air 4 mm instant tube fitting
    Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
    Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
    Heater Power Requirements1 208 VAC, 60 Hz, 900 W
    Carrier Gas Inert gas recommended
    Max Carrier Gas Flow1 10 standard liters/min N2 @ 50 psig
    Max Liquid Flow2 40 g/min (TEOS or equivalent)
    System Pressure Limit 150 psig
    Compressed Air 90 to 110 psig
    Temperature Range3 40°C to 200°C
    Temperature Sensor 2 type K thermocouples

    Specifications subject to change without notice.

    1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
    2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer..
    3 Appropriate venting is required.

Categories

200 装置、組み立て
  • クリーニング/組み立てとパッケージング用洗浄装置
    • 203 装置、検査及び測定
  • 欠陥/パーテクル/バンプ/汚染検出、評価、検査
    • 207 装置、プロセス
  • 積層化：化学的気相成長（ＣＶＤ）/MOCVD/ PECVD/ LPCVD/ ALD/ REALD/ MVD
    • 301 材料、化学物質と固体
  • 他の特定化学薬品
    • 400 部品、パーツと付属品
  • ガス用フィルタ、ゲッター、濾過機、触媒
  • 流量調節計-バルブ；メータ-、ゲージ、レギュレータ、流量計（MFC）
    • 401 サブシステム
  • ガス；サブシステムとしての液体供給パネル
    • 700 製造サービス
  • 校正及び規準
    • 900 サポート製品
  • 分析標準器/校正器
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