● Airtight, Anti-static, Light weighted.
● Original equipment applicable, and AMHS applicable. E-rack automated storage.
● Top Flange high-strength materials, and anti-shock and wear resistance.
製品名 |
ウエハサイズ |
部品番号 |
収納数 |
違さ |
Frame FOUP |
12" |
CKF300 |
13 pcs |
バッフル開けタイプ
|
Frame FOUP |
8" |
CKF200 |
13 pcs |
特許番号
台湾特許番号:M489156、M508114、M565877、M566707、M566903、M566905
中国特許番号:CN208400826U、CN208368484U、CN208538811U、CN208589423U
美国特許番号:US10847394
● Airtight, Anti-static, Light weighted.
● Original equipment applicable, and AMHS applicable. E-rack automated storage.
● Top Flange high-strength materials, and anti-shock and wear resistance.
Product name |
Wafer size |
Part number |
Capacity |
Difference |
Frame FOUP |
12" |
CKF300 |
13 pcs |
Door with movable type
|
Frame FOUP |
8" |
CKF200 |
13 pcs |
● Patent No.:
Taiwanese Patent No.:M489156、M508114、M565877、M566707、M566903、M566905
Chinese Patent No.:CN208400826U、CN208368484U、CN208538811U、CN208589423U
USA Patent No. US10847394