The SiCma is able to generate temperatures of up to 2,400 °C to sublimate the SiC material in a controlled environment. Despite its high-temperature capabilities, the SiCma operates with minimal energy consumption, reflecting a commitment to sustainable manufacturing practices in the field of advanced materials. The SiCma is designed to accommodate substrate sizes of 150 to 200 mm in diameter (6'' - 8''). Its high degree of automation and compact design make it an ideal choice for high volume production. For efficient loading and unloading a mobile system can be used. Additionally, we offer a variety of modular options, including turbo pumps and measuring devices, to cater to your specific needs.