Parameters
Dimensions: Wafer diameter 300mm (12 inches) ±0.2mm; thickness 6±0.2mm
Power supply: Battery
Temperature measurement range: 0℃ ~ 850℃
Temperature accuracy: ±0.2℃
Accuracy of repeated measurement: < 0.1℃
Number of sensors: 21
Measurement frequency: max.4Hz
Sensor response time: ≤ 1s
Communication interface: WIFI
Continuous working hours: 0℃ ~ 850℃ for 7minutes; 0℃ ~ 650℃ for 15minutes
Base material: Si
Warranty period: 1 year