Suzhou Supermag Intelligent Technology

蘇州,  江蘇省 
China
http://www.supermag.com
  • 小間番号5325


蘇州蘇磁科技(スパーマグ)会社は、リニアモーター技術を備えた技術企業であり、ブース 7930 にぜひお越しください。

蘇州蘇磁科技(スパーマグ)会社は、リニアモーター技術、製品、ソリューションを提供します。 磁気ウェーハターンテーブル、リニアモーターポンプなどの製品は、半導体の熱処理、洗浄、エッチング、接着剤の分散、研削および研磨、蒸着、高純度液体の輸送、撹拌、混合などの半導体およびウェーハの加工プロセスで使用されています。  リニアモーター技術は、クリーン度が高く、漏れがなく、せん断力が低く、信頼性が高く、全体的なコストが優れているため、業界のプロセス装置の革新をリードしています。

ぜひ、蘇州蘇磁科技(スパーマグ)会社東 5 ホール、ブース番号 5325 にお越しください。SEMICON JAPAN 2024 でお会いしましょう。


 出展製品

  • Supermag® SCM Maglev Wafer Rotation
    Supermag® SCM Maglev Wafer Rotation System is designed for wafer support and rotation in semiconductor equipment....

  • The Supermag® SCM Maglev Wafer Rotation System is designed for wafer support and rotation in semiconductor equipment. Utilizing advanced magnetic levitation bearing and motor integrated control technology, it surpasses long-standing foreign technological monopolies, with several parameters exceeding international standards. The rotor levitates and rotates without friction, dynamic seals, or particle generation, making it ideal for high-end chip manufacturing processes. These processes include oxidation, diffusion and annealing, rapid thermal processing (RTP), rapid thermal annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitridation (RTN), atomic layer deposition (ALD), chemical vapor deposition (CVD), single-wafer cleaning, metal-organic chemical vapor deposition (MOCVD), etching, spin coating, and more.

    Product Highlights

    • No Mechanical Friction, No Dynamic Seals, No Lubricants Required: Magnetic Levitation Support, Hollow Rotor, Clean and Reliable.
    • Integrated Magnetic Levitation and Motor Control: Featuring advanced control software, our system supports remote tuning support and seamless communication with upper-level systems such as PLCs and PCs. It is compatible with all Supermag® motor models.
    • Adjustable Speed and Precise Control Speed Range: 20-2500 RPM for precise control.
    • Fully Independently Developed, Customizable: International patents, Customizable to meet semiconductor process requirements.
    • Auto Zero Position and Adjustable Height: Designed to meet the rigorous demands of semiconductor process inspections.
    • Compatible with Various Wafer Sizes: Suitable for inspecting 6", 8", and 12" wafers.
  • Supermag® SCP Maglev Pump
    The Supermag® independently developed SCP Maglev Pump System is designed for the transportation of high-purity solutions and special media....

  • The Supermag® independently developed SCP Maglev Pump System is designed for the transportation of high-purity solutions and special media. The rotor rotates levitated in the fluid, no mechanical friction, particle generation, low shear, and low precipitation. With a wide range of flow rates and head pressures, minimal pulsation, intelligent control, and a compact size, it is an indispensable core equipment for up grading advanced semiconductor manufacturing processes.

    Product Highlights

    • No Mechanical Friction, No Particle Generation: The rotor operates suspended in the liquid, clean and gentle, reliable and durable.
    • High Purity, Low Precipitation, Corrosion Resistance: No Particle Generation: In fluid transport guarantees the cleanliness of the media.
    • Intelligent Control: Real-time speed adjustment, ensures stable flow rate and head pressure.
    • Support for Clockwise and Counterclockwise Rotation: Adjustable speed range from 1 RPM-10,000 RPM.
    • No Dynamic Seals: Reduces the risk of leakage.
    • 100% Proprietary Technology: Completely self-developed with a fully domestic supply chain.
  • Supermag® MSS Maglev Stirring System
    The Supermag® magnetically levitated impeller completely eliminates mechanical friction and the generation of particulates, virtually eliminating shear stress....

  • The Supermag® magnetically levitated impeller completely eliminates mechanical friction and the generation of particulates, virtually eliminating shear stress. It ensures gentle and clean long-term operation, while also enabling rapid mixing of multiphase media. For high-viscosity liquids, the movement of the impeller can be precisely controlled, achieving excellent process results.

    Product Highlights

    • Low Shear, No Mechanical Friction: The magnetically levitated impeller completely eliminates mechanical friction and shear, preventing particulate generation and virtually eliminating cell damage.
    • Supports Rapid Mixing of Multiphase Media: The high-speed vortex mode enables quick homogenization of solid-liquid and liquid-liquid mixtures.
    • Adjustable Speed, Supports Low-Speed High-Torque Mode: Capable of ultra-low-speed operation at 1 RPM, allowing precise control of impeller movement.
    • Large Clearance Design: Enhances solid particle accommodation.
    • Biocompatibility Certified Materials: Magnetically levitated components are rigorously tested and selected.
  • Supermag® SCT Maglev Turbomolecular Pump
    The Supermag® SCT Maglev Turbomolecular Pumps utilizes advanced magnetic levitation bearing technology to achieve complete non-contact levitation of the rotor....

  • The Supermag® SCT Maglev Turbomolecular Pumps utilizes advanced magnetic levitation bearing technology to achieve complete non-contact levitation of the rotor. This results in no mechanical friction, no lubricating oil, high cleanliness, reliable operation, and low vibration. It is capable of creating ultra-high vacuum environments and is widely used in the semiconductor and related industries, including wafer fabrication, etching, thin film deposition, ion implantation, research, and photovoltaics.

    Product Highlights

    • Achieves Ultimate Vacuum of 10-7 Pa to 10-8 Pa: Rotor capable of operating at very high speeds.
    • Controller And Pump Available in Both Separate and Integrated Configurations: Intelligent control software with remote tuning support.
    • Oil-Free and Frictionless, High Cleanliness: Designed with magnetic levitation technology minimizes bearing friction and eliminates the need for lubricating oil or grease.
    • Low Maintenance Costs, Long Lifespan: Clean and wear-free, ensuring a long operational life
    • Low Noise, Low Vibration: High reliability in operation.
    • Safety and Reliability: Intelligent monitoring of pump operational data ensures long-term operational safety.

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