Axcelis Technologies

Beverly,  MA 
United States
http://www.axcelis.com
  • 小間番号4621


Full Family of Innovative Ion Implant Solutions

Axcelis Technologies is a global leader in innovative semiconductor manufacturing equipment and services. For over 45 years, chipmakers around the globe have relied on Axcelis’ innovative systems and process expertise. Our goal is to accelerate the pace of innovation in these markets and shape the future of the digital revolution

At Axcelis, we have a single goal: to help semiconductor manufacturers achieve the highest quality and yield, with the lowest cost of ownership. In all that we do, our singular strategy is to align every Axcelis innovation and success with our customers’ goals, strive to understand the entirety of their challenges, and stand ready to deliver the technology, service, and support they need.

We understand that different semiconductor applications pose their own unique ion implantation challenges. We combine industry-leading technical expertise in fab process optimization with the most advanced ion implant technologies to deliver practical solutions tailored to the specialized needs of distinct market segments, including power devices, image sensors, mature process technology, memory and logic devices.

Our Purion product family, our flagship implant platform, includes the Purion H™ series high current, the Purion M™ series medium current, the Purion H200 series medium energy, and the Purion XE™ series high energy implanters. For mature process technology applications, semiconductor manufacturers can rely on Axcelis to provide a full range of 100 to 200mm substrate products designed to add process capabilities and boost your manufacturing capacity. The Axcelis GSD™ Series platform is the industry benchmark for multiwafer implanter productivity.


 出展製品

  • Purion H Series high current ion implanters
    Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications....

  • Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications. The flexibility of the platform enables us to tailor Purion H to the specific energy or dosing requirements of your application. The Purion H offers unmatched versatility, throughput and uniformity, so you can achieve greater yield with the lowest cost of ownership.
  • Purion H200 Series ion implanters
    The Purion H200 is our state-of-the-art single wafer high current medium energy implanter and the only true high current medium energy tool on the market....

  • The Purion H200 is our state-of-the-art single wafer high current medium energy implanter and the only true high current medium energy tool on the market. It has the industry’s widest energy range, from 10keV to 230keV. The Purion H200 combines high current power with medium current precision using advanced beamline technology from Purion H and high energy capabilities from Purion M.
  • Purion XE Series high energy ion implanters
    Our Purion XE series of ion implanters have rapidly earned a reputation as the industry standard for today’s demanding high energy recipes....

  • Our Purion XE series of ion implanters have rapidly earned a reputation as the industry standard for today’s demanding high energy recipes. Their unique RF Linear Accelerator (LINAC) technology offers higher reliability, a wider energy range and greater productivity than competing platforms, with superior metals contamination control.
  • Purion M Series medium current ion implanters
    Our Purion M ion implanters offer the broadest spectrum of mid-current doses available, offering unparalleled flexibility to meet today’s evolving implant requirements....

  • Our Purion M ion implanters offer the broadest spectrum of mid-current doses available, offering unparalleled flexibility to meet today’s evolving implant requirements. With high energy capability far beyond competitive implanters, the Purion M is ideal for fabs at higher elevations or those dealing with heavy mass species. Yet it’s 20% more energy efficient than competing platforms, contributing the industry’s lowest cost of ownership.
  • GSD Ovation
    The GSD platform is the industry benchmark for the longest manufactured and supported batch ion implanter....

  • The GSD platform is the industry benchmark for the longest manufactured and supported batch ion implanter. The Ovation™ is the latest batch configuration designed to seamlessly integrate with the existing fleet of Axcelis batch implanters, while providing incremental performance improvements with updated components for long-term sustainability. The Ovation extends the GSD series platform’s production relevance into the future while delivering the highest reliability, serviceability and lowest cost of operations.