SMIF Pod
Wafer SMIF Pod is able to load Cassette with wafers inside, provide protection to wafers during delivery and storage between process and process. Size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution, which can be used in SEMI Auto ALU Automatic Machine.
● High cleanness transfer, Purge & Non Purge, High temperature wear resistance
● CHD with three-point positioning contact design can reduce print mark.
SMIF PODにカセットを装填してウエハーの清浄環境を維持できる。
SEMI Auto ALU自動化マシーンに適用する。
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