Fastmicro

The Fastmicro Sample Scanner is an inspection tool for indirect measurement of surface particle contamination down to 0.5 micrometer particles using innovative 'tape-lift' samplers. These samplers or PMC cards facilitate flexible sampling on a variety of surfaces, including those that are difficult to reach or are unusually rough, without leaving any measurable residue. Quick and efficient, the scanner analyzes samples within seconds over a sample area of 225 mm², ensuring immediate and accurate results.

The versatility of the Sample Scanner is enhanced with different sampler options, including the card sampler holder for indirect measurements and the 1” wafer holder for fallout measurements. This adaptability makes it suitable to test diverse situations across various industries, providing robust measurements and valuable insights into contamination levels.

FM-PDS: multi-application modular platform

The modular Fastmicro Particle Defect Inspection System metrology platform can be customized to suit each production qualification process or to fit into a production line. This can include manual and automated wafer handling: package openers for inspection and cleaning, filling stations, robot arms, an inspection spot and a port for cleaning. 

The Fastmicro system allows for a scaled inspection surface to suit customer needs, without introducing extra imaging time and using limited floor space.

Direct measurements on product surface

The Fastmicro Particle Defect Inspection System has been developed to measure surface particle contamination levels directly on a product surface in any industry. The primary applications are wafer, pellicles and reticles inspection in Semicon, but also substrates, like in the display market. 

The Particle Defect Inspection System has a 4 to 12-inch FOV scanning area, with top- & -bottom-side capability, without moving the product in the metrology stage due to its distinct optics design.

The system can be customized, depending on the the surface that needs to be tested. The metrology module is also available as a white label solution for system integrators and OEM’s. 

Fallout Scanner for particle deposition rate monitoring

The Fastmicro Fallout Scanner has been developed to measure the particle deposition rate in any industry. It can be used in both vacuum as well as ambient environments.

The scanner module is also available as a white label solution for system integrators. 

Continuously measure where and when it matters.

The Fastmicro Fallout Scanner offers particle deposition rate monitoring with intervals in seconds. 

The particle deposition rate can be accurately measured starting at particles of just  0.5 µm. 

Combined with the easy to use software, we help our customers to view cleanliness measurements on surfaces instead of airborne-only. Not all particles remain airborne, as they could deposit on critical surfaces, impacting technical cleanliness. 

With the Particle Fallout Scanner, the actual deposition rate becomes clear and can be used for further cleanliness improvement.