Gudeng Precision Industrial

Provides high-efficiency protection for 510x515mm and 600x600mm Panel during transportation and storage. 
All dimensions are in compliance with SEMI specifications and can be customized according to machine parameter settings to ensure compatibility between the FOUP and machine. 
The robust materials are chosen to reduce the risk of panel being damaged during production.

˙Size: 510mm x 515mm Panel and 600mm x 600mm Panel

˙Material: Polycarbonate

˙Slot: 12/16

Provides high-efficiency protection for 300mm wafers during transportation and storage. 
Excellent air tightness and purge function can maintain the FOUP chamber in a clean and low-humidity environment. 
Low outgassing and low moisture absorption materials can effectively reduce the risk of wafers being contaminated due to outgassing. 
All dimensions are in compliance with SEMI specifications and can be customized according to machine parameter settings to ensure compatibility between the FOUP and machine.

l   Size: 300mm (12 in.)

l   Material: Polycarbonate 

l   Slot: 13/25

The dual-layer design of the box provides high-efficiency protection for the transportation and storage of 6-inch EUV reticles between process stations.
The inner EIP can be operated in a vacuum environment.
Supports purge function to control the temperature and humidity of the micro-environment inside the reticle carrier box.

˙Size: 6 x 6 x 0.25 (in.)

˙Material: PEEK (ESD), Metal

˙Usage: Support purge function

˙Application: Suitable for EUV process (ASML Certification)

Provides high-efficiency protection for transportation and storage of 6-inch reticles between process stations. 
The integrated upper cover design is easy to clean and the use of wear-resistant and high-clean materials reduces the risk of particle gereration.
The large transparent window is easy to view the internal reticle information.

˙Size: 6 x 6 x 0.25 (in.)

˙Material: Low moisture absorption & Super clean material

˙Application: Support 200mm SMIF standard mechanical interface

Provides 300mm wafer frame with high-efficiency protection during transportation and storage.

Low-outgassing material can effectively reduce the risk of wafers being contaminated due to outgassing.

300mm (12 in.)

PC(ESD)

13 Piece