Sealink is Design and produce R-axis for diffusion furnace, completely replacing magnetic fluid seals.
Sealink designs and produces the R axis for semiconductor diffusion furnaces. It completely replaces the magnetic fluid yarn. It can be used at higher temperatures than the magnetic fluid yarn and does not react with toxic gases. Its applications are furnace, CVD, ALD, implant, etchter, sputter, CMP, and autoclave.
Japanese equipment is used in the semiconductor deposition nitride process used by Company S, and at this time, it is a high vacuum R-axis unit to prevent gas from leaking into a gap that rotates when the inside of the equipment rotates.