Shanghai Jheat Technology

TC-Wafer Temperature Measuring System

Overview

The TC-Wafer Temperature Measuring System is designed to collect temperature data from the environment of process equipment. The system comprises the TC-Wafer unit and computer testing software. It features channels ranging from 1 to 34, capable of measuring a broad spectrum of temperatures. The system ensures real-time transmission of collected data, communicating with the computer via wired modes such as RS485, USB, or Ethernet. It also includes functions for data collection, storage, analysis, curve drawing, and cloud mapping.

Features

• The collection channels range from 1 to 34;
• The temperature measurement range is wide, from 0℃ to 1100℃ ;
• Diverse communication methods, such as RS485, USB, or Ethernet;
• For further analysis of temperature data, curves and cloud maps can be drawn.

Mask Wireless Temp System

Overview

Mask Wireless Temp System is used for qualification and monitoring of e-beam writers as extreme temperature stability is required over the extended time period (up to 24 hours) to completely write a mask.Mask Wireless Temp System collects temperature data for 24 consecutive hours, providing mask manufacturers with the data needed to ensure the thermal stability of the system prior to writing critical masks.

Features

• Small size, high accuracy, high measurement speed;
• Temperature accuracy up to 10mK;
• Wireless communication, short response time.