Patent design of vertical Z-stage and high-speed rotary stage in 1 unit
Compact and light, +-110 mm height
1 – 4 Build-in vacuum channels for chuck
R-Axis:
•Max. Stroke: 360° cont. rotation
•Max. speed: 5000 RPM
•Max. Acc/dec (with 4kg chuck): 125 rad/sec
•Following error: ±4 arc-sec
•Radial error motion (@ max speed): <200-nm
•Axial error motion(@ max speed): <200-nm
•Axial run-out: ± 1µm
Z-Axis:
•Max. Stroke: 1.5 mm
•Max. payload capacity: 5 Kg
•Max. speed: 60 mm/s
•Max. acc/dec (with max. payload): 0.6G
•Bandwidth (with max. payload): 250 Hz
•Integrated VAC/CDA channels: up to 4
•Support autofocus