PNEUMAIC Vacuum Ball Valve
Application : Semiconductor scrubber equipment.
Features: FULL BORE TYPE 3-WAY BALL
HEATING TYPE (STD. 220℃ ,240℃)
HORIZONTAL, VERTICAL TYPE
High-precision Motorized Valves
Application : Refrigerant and PCW (Process Cooling Water) control in semiconductor chiller systems.
Features : High resolution (3,400:1)
Zero hysteresis
High reliability: 1,000,000 cycles
Wide operating temperature range (-120℃ to 250℃)