The BatchGlass Lab is a semi-automated wet processing system designed for glass substrates. It accommodates a wide range of sizes – from small wafers to large panels up to 600 × 600 mm – and provides high-precision etching, cleaning, and drying within a single batch process.
Etching under controlled conditions enables excellent selectivity, while RENA’s advanced pre- and post-cleaning steps ensure optimal substrate preparation and superior surface quality. These cleaning procedures are particularly beneficial for glass substrates with fine or deep cavities, where residue-free surfaces are essential.
A sophisticated tank design with optimized flow dynamics guarantees outstanding etching homogeneity across all substrates. Combined with RENA’s expertise in wet chemical processing, the BatchGlass LF HTX delivers reliable and consistent performance, even for demanding applications such as through-glass vias (TGV) in advanced packaging.
Features and Benefits
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Processing of large panels up to 600 × 600 mm
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Optimized tank and flow design for excellent etching uniformity
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Compact footprint and modular, space-saving design
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24/7 operation and scalable process integration
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Superior surface cleanliness through optimized pre- and post-cleaning