RORZE

We have developed the “Flap Wrist”, a robotic wrist mechanism that enables flexible handling of not only conventional silicon wafers but also warped wafers and ultra-thin wafers that have been significantly thinned during the manufacturing process.

The Flap wrist features a pair of vacuum-chuck fingers mounted at the tip of the wrist. These fingers move vertically to adapt to the shape of the wafer, allowing secure gripping and precise transfer. In addition, the mechanism includes a function to flatten the wafer’s shape during handling.

We have developed a load port and robot (wrist) for PLP handling.
At this exhibition, we are demonstrating the following key functions using actual equipment:

〇Mapping Function with High-Resolution Camera

The load port is equipped with a high-resolution camera that serves as a mapping sensor. This function detects the substrate’s condition, thickness, and shape. We will showcase real-time monitoring of the information captured by the camera.

〇Robot Operation Monitoring Function

Using our proprietary system bus, we provide real-time monitoring of critical parameters during robot operation, including:

・Motor torque status during movement

・Vibration levels (acceleration) at fixed points

・Workpiece gripping status via vacuum pressure sensor values

This demonstration highlights our advanced capability for precise control and data-driven monitoring in PLP handling.