Experts in Plasma Process Technology & Thin Film Metrology
SENTECH Instruments GmbH社は、ドイツに本社を置く、半導体・ナノテクノロジー・太陽光発電分野向けの装置メーカーです。先進的なプラズマプロセス技術や薄膜計測技術を強みとしており、精密な測定・制御を実現する機器の開発・製造・販売を行っています。
SENTECH is a German manufacturer with over thirty years of experience developing and manufacturing plasma process technology systems and thin film metrology tools for research and development and industrial production worldwide. Our robust systems focus on the etching, deposition, and characterisation of thin films in semiconductor technology, microsystems technology, photovoltaics, nanotechnology, and materials research.
The SENTECH flexible and reliable plasma etch and deposition systems, including atomic layer deposition equipment, support state-of-the-art processes and applications. Our tools and systems are used worldwide for applications in the fields of nanotechnology, micro-optics, sensor technology, photonics, and optoelectronics. Low-damage etching and coating with the proprietary SENTECH Planar triple spiral antenna (PTSA) inductively coupled plasma (ICP) source enables our customers to manufacture compound semiconductors and semiconductor devices with outstanding sensitivity, scalability, and non-destructive properties.
SENTECH offers a wide range of spectroscopic ellipsometers, laser ellipsometers, and reflectometers for measuring the thickness and optical constants of very thin layers or layer stacks. SENTECH has achieved particular success in the field of industrial quality control, for example in photovoltaics, 5G devices, and sensor technology.
For more information please visit our website www.sentech.de