KPM560 Full Range Penning Module Vacuum Gauge
The KPM560 is an advanced, high-precision, full-range vacuum gauge that operates by combining three distinct sensors: Piezo (Pressure Sensor), MEMS Pirani, and Penning Cold Cathode.
Because all three sensors operate within a single, compact module, this gauge offers excellent spatial efficiency.
A single KPM560 gauge can accurately measure a wide vacuum range from 1500 Torr (atmospheric pressure) down to 1.0E-8 Torr (high vacuum) and has obtained CE (EMC, RoHS) certification for proven reliability.