LNEYA Thermo Refrigeration

无锡市, 江苏省
China
http://www.cnzlj.com

小間番号W3857

ホーム
出展製品

LNEYA focused on the research, design and production of semiconductor temperature control devices Chiller. The product temperature control range is from -100℃ to +90℃, with a temperature control accuracy of up to ±0.05℃. It supports multi-channel independent temperature control. Each channel has a separate temperature control range, cooling and heating capacity, and heat transfer medium flow, etc. It is mainly used for precise control of reaction chamber temperature in semiconductor processes.
Discover more on https://www.lneya-online.com/

出展製品

Single channel chillers

FLTZ single channel chiller easily achieves independent and precise temperature control for multiple fluid channels, with a temperature control accuracy of up to ±0.1℃, widely applied in the semiconductor industry.... More Info Less Info

Single-channel chillers are primarily used for precise temperature control in semiconductor production and testing. The company utilizes multiple algorithms (PID, feedforward PID, and model-free self-building tree algorithms) to achieve fast response and high control accuracy.

Under load, the system offers high temperature control accuracy, allowing for flexible switching between -100°C and +90°C with excellent temperature compliance. Advanced low-temperature refrigeration technology supports ultra-low temperature control from -100°C to -80°C.

Peltier Chiller

TEC -20℃~90℃, TEMPERATURE ACCURACY ±0.1℃, Provide reliable and precise temperature control for wafer etching process... More Info Less Info

LNEYA Peltier chiller thermoelectric cooler temperature range from -20 to 90℃, tailor-made for the semiconductor industry;

Based on the proven Peltier heat conduction principle, the Peltier temperature control system can provide repeatable temperature control for plasma etching applications; dynamic temperature control of the electrostatic chuck (ESC) enables it to be applied to all types of etching processes.

Thermal Probe

Supports rapid heating and cooling from extremely low temperatures to high temperatures. The fastest rate can reach 50’C/min. It can accurately control the temperature, and the error is usually within +0.2℃.Applied to chip R&D: Verify the performance of the chip at different temperatures during the chip design phase;Quality control: Conduct reliability tests during chip production to ensure that the product meets the standards;Failure analysis: Analyze the effective mode of the chip at extreme temperatures through high and low temperature tests.

LNEYA Thermo Refrigeration

出展製品

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