Axcelis Technologies

Beverly,  MA 
United States
http://www.axcelis.com
  • Booth: 5504


The Power of Purion Welcome to the Zettabyte Era

The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers’ device performance and yield.   The systems’ common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis’ industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform’s proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform’s superior beam current performance combined with the Purion™ 500wph end station provides the industry’s highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

 

 


 Press Releases

  • BEVERLY, Mass., Oct. 15, 2015 -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has released an extended energy range option for its industry leading Purion XE™ high energy implanter.  This new option was developed specifically to address the emerging needs of the image sensor and specialty device manufacturers. The extended energy range option is scheduled to be available on new systems in the second quarter of 2016.

    Bill Bintz, executive vice president, marketing and engineering, commented, “We’re excited to be able to offer our customers the ability to perform ultra-high energy implants for next generation image sensor and power device manufacturing.  These implants enable extremely precise and very deep doping profiles, for applications that include deep wells. In the case of image sensors, this allows for more effective separation of photodiodes, reduced noise and dark current, and higher quality color.”  He continued, “The Purion XE also excels at this application due to the unique contamination filtering capabilities of its RF linear accelerator technology, which results in a metals-free implant process to achieve optimum image quality.  This is accomplished while delivering the industry’s highest throughput and capital efficiency.”

    John Aldeborgh, executive vice president, customer operations, commented, “Image sensors and specialty devices are two of the fastest growing market segments in IC manufacturing, due to the proliferation of smartphones, tablets and digital cameras.  We see significant opportunity for the Purion XE in these very active markets.”

    The Power of Purion

    The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers’ device performance and yield.   On this platform, Axcelis has built the industry’s first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems’ common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis’ industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform’s proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform’s superior beam current performance combined with the Purion™ 500wph end station provides the industry’s highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE high energy implanter.

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.
     

    CONTACTS:

    Maureen Hart (editorial/media) 978.787.4266

    Doug Lawson (investor relations) 978.787.9552

     

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  • BEVERLY, Mass. — November 4, 2015—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2015. Recent highlights include:

    • Revenues of $79.3 million, above the second quarter.
    • System revenues of $47.0 million, a 13% increase over the second quarter.
    • Operating profit of $7.7 million, a 7.2% increase over the second quarter.
    • Improved gross margin to 36.8% from 34.6% in the second quarter.
    • Increased cash and cash equivalents to $79.9 million from $78.1 million in the second quarter.

    The Company reported third quarter revenue of $79.3 million, compared to $78.4 million for the second quarter of 2015. Operating profit for the quarter was $7.7 million, compared to $7.2 million for the second quarter. Net income for the quarter was $6.1 million, or $0.05 per share. This compares to net income for the second quarter of 2015 of $5.9 million, or $0.05 per share. Cash and cash equivalents were $79.9 million at September 30, 2015, compared to $78.1 million on June 30, 2015.

    “Strong third quarter results demonstrate our progress in gaining market share and improving profitability,” said President and CEO Mary Puma. “The rapid adoption of the Purion platform across multiple customers has strengthened Axcelis, allowing us to address the upcoming industry slowdown from a much stronger position.  As a result, Axcelis will enter the next upturn with higher market share, a larger and growing customer base, new product capabilities and higher earnings potential.”

    Business Outlook
    For the fourth quarter ending December 31, 2015, Axcelis expects revenues to be $60-65 million. Gross margin in the fourth quarter is expected to be approximately 33-34%. Fourth quarter operating profit is forecasted to be approximately $1 million with breakeven earnings per share. Cash and cash equivalents at the end of the fourth quarter are expected to be approximately $80 million.

    Third Quarter 2015 Conference Call
    The Company will host a conference call today at 5:00 pm ET to discuss results for the third quarter 2015. The call will be available to interested listeners via an audio webcast that can be accessed through the Investors page of Axcelis' website at www.axcelis.com, or by dialing 866.588.8911 (707.294.1561 outside North America).  Participants calling into the conference call will be requested to provide the company name, Axcelis Technologies, and pass code: 50434142. Webcast replays will be available for 30 days following the call.

     

    Safe Harbor Statement

    This press release and the conference call contain forward-looking statements under the SEC safe harbor provisions. These statements, which include our guidance for future financial performance, are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the timing of orders and shipments, the conversion of orders to revenue in any particular quarter, or at all, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.
     

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

    Company Contacts

    Investor Relations:
    Doug Lawson
    978.787.9552

    Editorial/Media:
    Maureen Hart
    978.787.4266

  • BEVERLY, Mass.— Oct. 6, 2015—Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received an order for the Purion XE™ high energy implanter from a major chipmaker in the Asia Pacific Region. The system will be used to support the development of next generation VNAND Flash devices in the chipmaker’s premier research center. The system is scheduled to ship in the fourth quarter. 

    John Aldeborgh, executive vice president, customer operations, said, “We are very excited to be selected by this R&D center to develop their next generation devices. The Purion XE will be a key element of this customer’s process development efforts. As cloud based solutions and mobile devices increasingly become a part of daily life, the need for cost efficient and reliable 3D NAND memory devices is expected to grow considerably. We see significant opportunity for the Purion XE as adoption accelerates.”

    Bill Bintz, executive vice president, marketing and engineering, commented, “Our expertise in high energy implant technology has resulted in our ability to proactively address the emerging needs of the advanced flash memory market. The Purion XE was selected over competitive systems because of its ability to provide the most precise dopant placement, including exacting angle control, which is critical to ensure high levels of performance and yield in the customer’s new 3D processes.”

    The Purion Platform

    The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers’ device performance and yield. On this platform, Axcelis has built the industry’s first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability. This cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis’ industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform’s proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform’s superior beam current performance combined with the Purion™ 500wph end station provides the industry’s highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE high energy implanter.

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

     

    CONTACTS:

    Maureen Hart (editorial/media) 978.787.4266

    Doug Lawson (investor relations) 978.787.9552

     

     

     

     

     

  • BEVERLY, Mass., Sept. 29, 2015 -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry,  announced today that it has received orders for the Company’s Purion M™ medium current implanter from three leading specialty device chipmakers. The systems, ranging in wafer sizes from 150-300mm, will be used in high volume production of image sensors, power devices and specialty logic chips supporting automotive, mobile and the Internet of Things market spaces. The first system has shipped, with revenue expected in the fourth quarter.  The other tools will ship in the second half of 2016, upon completion of a R&D program funded by two customers.

     “These wins highlight the advantages the Purion M provides for specialty device manufacturing, especially in the areas of energetic metals contamination control and advanced process control” said Bill Bintz, executive vice president, engineering and marketing. “The Purion M’s innovative hybrid filtering technique is the only technology available today specifically designed to utilize both magnetic and electrostatic filtration to enable unmatched metals filtration, subsequently delivering significantly higher device yield for our customers.” He continued, “New investments in R&D for advanced process control technologies, specifically designed to address emerging device types and substrates, will enable fabrication of these structures at the highest levels of productivity and yield.”

    John Aldeborgh, executive vice president, customer operations, commented, “We’re excited about the adoption of the Purion M in the very active specialty device market. Our customers in this space have seen a strong resurgence in business, and they are actively upgrading for technology and productivity reasons.  This market has accounted for nearly half of our sales in 2015, and we look forward to expanding our footprint with the full Purion Platform, including the Purion M, Purion H, and Purion XE.” 

    President and CEO Mary Puma said, “We reiterate Q3 guidance and remain confident that Axcelis will exit 2015 with 17-20% market share of the implant market. We also expect continued market share growth in 2016 as the Purion product family enters volume production at additional memory and non-leading edge logic and foundry fabs.”

    Safe Harbor Statement

    This press release contains forward-looking statements under the SEC safe harbor provisions. These statements, which include our guidance for future financial performance and market share, are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the timing of orders and shipments, the conversion of orders to revenue in any particular quarter, or at all, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

    CONTACTS:

    Maureen Hart (editorial/media) 978.787.4266

    Doug Lawson (investor relations) 978.787.9552

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  • BEVERLY, Mass., Jan. 12, 2016 -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it was updating guidance for the fourth quarter of 2015, prior to presenting at the18th Annual Needham Growth Conference this week. 

    The Company now expects fourth quarter revenue of approximately $70 million, gross margins in the low 30% range and operating profit of approximately $2 million. Earnings per share are expected to be breakeven to $0.01 and our cash balance will be approximately $85 million.

    Kevin Brewer, executive vice president and chief financial officer said, “Purion systems sales have been the driver of our top line in 2015. Gross margins in the fourth quarter will be slightly lower than guidance, impacted by the closure of one of our outstanding Purion H evaluation tools one quarter sooner than expected. We are pleased that 2015 has been a positive year for Axcelis in terms of market share growth and improved financial performance.”

    Safe Harbor Statement

    This press release contains forward-looking statements under the SEC safe harbor provisions. These statements, which include our guidance for future financial performance, are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the timing of orders and shipments, the conversion of orders to revenue in any particular quarter, or at all, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.
     

    About Axcelis:
    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

     

    CONTACTS:
    Maureen Hart (editorial/media) 978.787.4266
    Doug Lawson (investor relations) 978.787.9552

     

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 Products

  • Purion M
    Medium Current Implanter ...

  • The Purion M is the only low energy, medium current ion implanter for all channel engineering applications in the low dose and mid dose regimes. The single wafer productivity-driven platform covers traditional medium current processes, as well as emerging low energy mid-dose HALO implants and sub-MeV Well Implants.

    • Broad Energy Coverage. 2.0keV to 1MeV energy range covers a wide operating space, allowing versatility for production runs and advanced R&D on 2Xnm devices.
    • Pure Beamline: Pencil beam optics, electrostatic scanning and beam parallelizing lens deliver pure and productive low energy performance.

    • Maximize Yield. In-situ angle measurement and control capability coupled with Axcelis’ proprietary constant focal length scanning protects against yield loss.

    • Boosts Productivity. Industry leading beam currents with 500WPH end station enable industry’s highest productivity.

    • Zero Energy Contamination. Patented angular energy filter eliminates all forms of energy contaminants.

  • Purion H
    High Current Implanter ...

  • The Purion H is Axcelis’s next generation single wafer high current implanter.  As a member of the Purion ion implanter family, the Purion H ushers in a new era of yield-enabling ion implant technology.  The Purion H was designed to provide customers with an unprecedented level of process flexibility to address the modern challenges of the transition to 3D devices.  All Purion ion implanters feature the platform’s four common proprietary technology differentiators; Purion Contamination Shield, Purion Vector Dose and Angle Control System, Purion 500WPH endstation and the Eterna ELS source.  The Purion common technology is designed with customer’s requirements for more precise dopant placement, enhanced electrical performance and better yield. 

    • Industry Leading Purity. Unique 5-Filter beamline delivers unmatched beam purity for low variability and defects for maximum process yield.
    • Industry Leading Precision. Enhanced spot beam technology to deliver the most precise dose, angle and dose rate on all points of the wafer for the tightest process control for improved device performance.
    • Industry Leading Productivity. Leading high current productivity via the industry’s highest beam currents, quickest tune times and industry’s fastest 500WPH end station.
  • Purion XE
    High Energy Implanter ...

  • The Purion XE next generation single wafer high energy implanter is the second tool in the expanding family of Purion ion implanters. An evolution of the industry leading Optima XEx, the Purion XE combines the process and productivity advantages of the Optima XEx linear accelerator and beamline technology with the reliability, precision, process flexibility, and performance options that define the Purion platform. The system is now also available with an extended energy range options for ultra high energy implants.

    • Industry Leading Purity. Proprietary LINAC technology inherently filters out impurities. Ions with the wrong mass, wrong species or wrong charge state are automatically eliminated for optimized yield.
    • Industry Leading Precision. Horizontal and Vertical in-situ measurement and correction coupled with constant focal length scanning deliver the most precise and repeatable dopant placement available today
    • Industry Leading Productivity Utilizes the production proven RF Linear Accelerator (LINAC) technology providing customers with the industry’s broadest energy range and highest beam currents.  Coupled with the market leading >500WPH Purion end station, the Purion XE provides >2X the productivity of competing high energy systems.
    • Lowest Cost of Ownership. Utilizing the production proven RF LINAC technology coupled with the Eterna ELS source, the Purion XE provides customers with the highest levels of reliability while maintaining the lowest total cost of operation.