Oxford Instruments Plasma Technology
High performance flexible tools for semiconductor processing
Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures. Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, HBLED, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in: - Plasma Etch & Deposition - Atomic Layer Deposition (ALD) - Ion Beam Etch & Deposition - Deep Silicon Etch Products range from compact stand-alone systems for R&D, through to batch tools and up to cassette-to-cassette and clustered platforms for production processing. Visit our booth to learn more about our latest batch and single wafer production solutions for HBLED manufacturers.