ODIN is a fully automated AOI tool for the optical inspection of patterned and non-patterned wafers, their edges and their non-patterned back sides. All these features are seamlessly integrated in one single tool, without additional footprint for back side and edge inspection options. Depending on the utilization, the ODIN can be equipped with two, three or four loadports. Adding a second inspection module instantly doubles the throughput. The key feature of this tool is both high throughput and high sensitivity at the same time, which is unique for automated macro inspection systems on the market. Any found defects can be captured in parallel and in the same run with the help of a built-in high-end Carl Zeiss microscope. So, the strength of the tool is the large bandwidth of detection capability: ODIN is capable to visualize even smallest defects as well as large colour variations across the entire wafer, which may indicate process variations.