Photoresists are either positive tone or negative tone and most pervasively used in the manufacture of integrated circuits and flat panel displays.
Materials for the integrated circuit industry can be used for a wide variety of lithographic processes covering a wide range of exposure tools and processes. Applications range from sub-micron geometries to thick film applications. All materials are spin coated and can be matched to a large variety of substrates.
Materials for the flat panel display industry can also be used for a wide variety of processes. Applications extend beyond the 5th generation spin coating, into advanced slit-coating processes. Materials are also available for roller coating and extrusion coating.
1) IC Photoresists
g/line/Broadband/xover, 1500 series, 5200 series, 6000 series, 6600 series, 8100, GXR-601
2) Thick Film Photoresists (TFR)
P4000 series, 9000 series, TPM606, 10XT, 40XT, nXT series