Sensirion Korea Ltd.

Anyang-si, Gyeonggi-do, 
Korea (South)
http://www.sensirion.co.kr
  • Booth: 2577

Experts for Smart Sensor Solutions

Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.


 Products

  • SFC5000 series
    The SFC5000 series enables extremely precise and repeatable control over a wide dynamic measuring range. The excellent performance of the mass flow controllers is based on Sensirion's innovative CMOSens® Technology . ...

  • The SFC5000 series enables extremely precise and repeatable control over a wide dynamic measuring range. The excellent performance of the mass flow controllers is based on Sensirion's innovative CMOSens® Technology which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single CMOS silicon chip.

    The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The new mass flow controllers feature both analog and digital interfaces. Furthermore, they enable new optional features such as multi-gas, gas recognition and self-test capability. The mass flow controllers of the SFC5000 series are the ideal solution in different applications across industrial and medical markets.

    The SFC5400 is available as mass flow meter too. The SFM5400 model provides the same features like the mass flow controller and is suitable for similar applications. For more information about the SFM5400 mass flow meter, please contact our sales experts.

    Sensirion has a strong competence and experience in offering customized solutions for large volume OEM projects. Our competent and highly-motivated engineering team develops desired products on the basis of the SFC5000 platform.

    Features

    • High accuracy and repeatability
    • Excellent long-term stability and reliability
    • Wide dynamic range (turndown ratio 1000:1)
    • Ultra-fast gas flow control (settling time < 50 ms)
    • Optional multi-gas, multi-range and gas recognition functionality
    • Digital and analog interfaces
    • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc.
    • Calibration traceable to NIST standard
    • Outstanding value for money thanks to innovative CMOSens® Technology
    • Customized versions available on request

    Applications

    • Analytical instruments (e.g. gas chromatography, mass spectrometry)
    • Medical devices (e.g. ventilation, anesthesia)
    • Industrial process automation (e.g. coating, thermal processing) 
    • Semiconductor industry (e.g. plasma etching processes, thin film deposition

     

  • SLQ-QT500
    The SLQ-QT500 features a flow range up to 120 ml/min for water-based liquids as well as hydrocarbon based liquids. It is ideal for the integration into demanding coating systems in the semicon industry . ...

  • The SLQ-QT500 features a flow range up to 120 ml/min for water-based liquids as well as hydrocarbon based liquids. It is ideal for the integration into demanding coating systems in the semicon industry as well as for a wide array of dosing and flow applications in other industries.

    Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The wetted parts are just the PFA fittings and the quartz glass tube. The whole fluidic path is straight and there are no obstacles or moving parts in the sensor. The SLQ-QT500 is ideally suited for liquids with virtually any viscosity as well as liquids which contain small particles as long as they are not abrasive for the quartz glass tube.

    A smart digital interface and robust RS485 communication is offered for long distance and bus capabilities. The unsurpassed sensitivity and measuring speed offer new possibilities for the monitoring or control of fast dosing operations. The instantaneous flow rate of the fluid is available as well the output of a total dosed volume with automatic dosing detection. The sensor is available with calibration for H2O and isopropanol (IPA).

    Features

    • For flow rates up to 120 ml/min (hydrocarbons and water based liquids)
    • Fast response time down to 30 ms
    • For high and low viscosity liquids
    • For liquids with small particles
    • RS485 digital interface
    • Straight flow path, no moving parts
    • Assured purity
    • Highest sensitivity down to the lowest flow rates
    • Superb chemical resistance, inert materials
    • Wetted materials: PFA and quartz glass only
    • Maximum working pressure 10 bar

    Applications

    • High-end semiconductor process control
    • Industrial automation
    • Fast dosing operations
  • SLQ-QT105
    Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photoresists and solvents.
    ...

  • Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

    Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

    For water-based liquids and flow rates up to 120ml/min, see our liquid flow meter SLQ-QT500.

    Features

    • For flow rates up to 120 ml/min (hydrocarbons)
    • Highest sensitivity down to the lowest flow rates
    • Fast response time down to 30 ms
    • RS485 digital interface
    • For photoresists and solvents
    • Straight flow path, no moving parts
    • Assured purity
    • Superb chemical resistance, inert materials
    • Wetted materials: PCTFE, PFA and quartz glass only
    • Maximum working pressure 3 bar (high pressure ratings available on request)

    Applications

    • High-end semiconductor process control
    • Fast dosing operations

     

     

  • SLS-1500
    The SLS-1500 offers a versatile sensing solution for applications in demanding industrial environments and laboratory settings. Sensirion’s modular approach to combining sensor and interface cable ensures an optimal match. ...

  • Featuring Sensirion’s innovative sensor technology in a robust housing, the SLS-1500 offers a versatile sensing solution for applications in demanding industrial environments and laboratory settings. Sensirion’s modular approach to combining sensor and interface cable ensures an optimal match, which means the integration of a flow sensor has never been easier.

    Capable of fast and precise measurements for flow rates of 0 ml to 40 ml/min, the SLS-1500 enables closer process monitoring than ever before. With a typical response time of 20 ms, it measures highly dynamic dispensing processes quickly and reliably. The flow channel inside the sensor is completely straight, open and has no moving parts. Inert, wetted materials provide outstanding chemical resistance and excellent biocompatibility.

    The SLS-1500 is compatible with SCC1 interface cables, offering USB, RS485 or analog voltage output connections. The most recent addition to Sensirion’s range of liquid flow sensors is a compact, cost-effective and precise sensor that is ready for immediate use.

    Features

    • RS485, USB or analog voltage output connections
    • Fast response time of 20 ms
    • Flow rates of 0-40 ml/min
    • No moving parts
    • Completely calibrated, digital linear output signal
    • Compact Size
    • Wetted materials: Stainless steel, PTFE und PEEK

    Applications

    • Diagnostics
    • Analytical instruments
    • Biomedical devices
    • Fuel cells
    • Industrial automation

     

  • SFM4100
    The CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. ...

  • Designed for anaesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, and operates reliably at pressures of up to 7 bar.

    Its outstanding long-term stability makes the SFM4100 first choice for products that require a high rate of deployment with long service intervals. For OEM projects, more than one gas calibration can be stored simultaneously in each sensor device. Self-test features allow testing of the entire signal chain (from capture of the analogue signal through digital signal chain) while the mass flow meter is in use. This makes the SFM4100 an optimal solution for safety-critical applications.

    Features

    • Measurement of flow rates from 0 to 20 l/min
    • No drift
    • Wide dynamic range (1:500)
    • Digital I²C interface
    • Digitally calibrated and temperature compensated
    • Multigas Option

    Applications

    • Anaesthesia, inhalers and other medical instruments
    • Analytical equipment
    • Process Automation

     

    Choose Your Type

    Depending on your specific calibration requirements, you can choose from different types of sensors:

     

     

  • ASF1430
    The ASF1400 and ASF1430 gas flow sensors enable extremely accurate bidirectional measurement of fast changing gas flow over four orders of magnitude. ...

  • The ASF1400 and ASF1430 gas flow sensors enable extremely accurate bidirectional measurement of fast changing gas flow over four orders of magnitude. They are fully calibrated and temperature compensated and provide fast response time at lowest power consumption.

    The leading performance is based on Sensirion's CMOSens® Technology. Mounted in rugged, chemically inert PBT housing the ASF1400/1430 is suitable for a wide range of applications. Such include mass flow metering for process control, medical and HVAC applications.

    Features

    • Fully calibrated and temperature compensated
    • Linear digital output signal (RS-232)
    • Fast response time (ASF1400: 150ms / ASF1430: 5ms) § Rugged chemically innert PBT housing
    • CE-certified / FCC (CFR 47)
    • Leading CMOSens® Technology for superior performance
    • Unbeatable price-performance ratio
    • Easy-to-use due to calibration & standard digital interface

    Applications

    • Automation & process control
    • Building control and HVAC
    • Medical devices
    • Test & Measurement equipment
    • Combustion