CSK Inc.is the professional manufacturer/supplier that provides a treatment solution for exhaust gas that occurs in the semiconductor/LCD manufacturing process and the next generation of a precursor.
CSK Scrubber focuses on quantitative of hazardous and toxic gases from semiconductor manufacturing process effluents. As a variety of the products used by catalytically-active chemisorbents, high temperature (in) direct oxidation reaction, wet treatment and high energy of plasma, CSK Scrubber allows finetuning to all relevant process gas and ensures maximum efficiency and minimum maintenance requirement. CSK also produces TCT and TDS System. TCT System (The Tri-chemical Delivery System) is to assure a safe and consistent supply of ultrahigh purity liquid precursor. TDS System (The Terminal Delivery System) is especially designed to dispense ultra-high purity liquids to process tools in the semiconductor and fiber-optic industries.