New Power Plasma

Gyeonggi, 
Korea (South)
http://www.newpower.co.kr
  • Booth: 1374


Thank you for vistiing New power Plasma.

New Power Plasma has become a world class leader in offering innovative and reliable RF power solutions for customers to achieve high quality products efficiently. 

Our advanced technology facilitates the ever important fields of manufacturing thin-film, flat panel displays, and solar cells with cutting edge RF generators, Matching Networks, and Remote Plasma Source. 

New Power Plasma uses expertise in RF power and plasma technology to provide high-quality products and support. We strive for high standards of excellence in customer satisfaction when it comes to all NPP products. 

 

 


 Products

  • RPS(Remote Plasma Source)
    Dry cleansing of inside the deposition chamber of semiconductor/display process using large amount of flourine radicals. ...

  • 1. Usage

    Dry cleansing of inside the deposition chamber of semiconductor/display process using large amount of flourine radicals.

     

    2. Technical competitiveness

    • World's Best Product
      • Market Share No.1 in Korea
    • Through-put Enhancement
      • Reduced Clearing Time, improved PM cycle
    • High Density Plasma generation technology
      • Ferrite Core ICP Plasma Source
    • Eco-friendly Cleansing (Dry Cleaning)
      • Reduced RFC Gas emission (over 95% decomposition efficiency)
      • Uses Alternative Gas (NF3, C3F8, SF6, F2, CF4, etc)
      • Easy Maintenance
  • RF Generator
    High-Frequency power generator for the generation of plasma
    ...

  • 1. Usage

    • High-frequency power generator for the generation of plasma
      • RF Generator for Power High-Frequency FET

    2. Technical Competitiveness

    • Korea's representative high-frequency power supply
      • Continuous R&D of over 20 years
    • High-freuqency power control technology
      • Low Harmonic Distortion
      • Applicable for current Distortion Load
      • Applicable for Narrow Band width Load
    • High output/Highly stable/Lightweight product
      • ~50kw
      • Fluctuation rate ±0.5%
      • Light Weight/Compact Size

     

  • Matching Network
    Delivers maximum high-frequency power from RF generator to the process chamber(load) and induces generation of plasma
    ...

  • 1. Usage

    • Delivers maximum high-frequency power from RF generator to the process chamber(load) and induces generation of plasma
       

    2. Technical competitiveness

    • Application of qualified mass production technoloty
      • Mass production of over 1,000 units.
      • Satisfies on-site demand and easy repairs
      • Development of customized product
    • Original technology for plasma source