Seron Technologies Inc.

Uiwang-si, Gyeonggi-do, 
Korea (South)
http://www.serontech.co.kr
  • Booth: 4701


Seron Technologies Inc. - desktop mini SEM to FE SEM.

With accumulated know-how and technology over last 15 years, Seron provides full range of scanning electron microscope models from desktop mini SEM to FE SEM. Seron has been specialized in electron beam technology and provides not only SEM but also various advanced equipment such as e-beam joining system and hybrid XEM. Seron is proud that their product fully satisfies customer's various requ ests with their powerful instrument at competitive price range.
 

Since launched the very first Korean scanning electron microscope (SEM) in 2001, Seron Technologies Inc. has become one of valuable SEM brands.With accumulated know-how and technologies over past 15 years, Seron provides full range of SEM models from desktop SEM, compact SEM up to normal SEM.At the same time, Seron also has devoted to the various requests for advanced R&D researches by their unique e-beam technologies.Hybrid X-ray imaging SEM (Hybrid XEM) and micro e-beam joining system are their remarkable outcomes fot the edge of tomorrow. It is pleasure to announce that SEMICON/LED Korea 2016 will be the opening event of introducing the very first Korean FE SEM.


 Press Releases

  • 나노미터급 초미세 시료를 관찰하고 성분까지 분석할 수 있는 전계방사형 주사전자현미경(FE SEM: Field Emission Scanning Electron Microscope)과 주사 전자현미경(SEM: Scanning Electron Microscope) 국내 최초로 국산화에 성공한 ㈜새론테크놀로지(대표 구정회)는 오는 1월 27일~29일 열리는 SEMICON KOREA2016에 참가합니다.
     

    2000년 초, 영상 처리 및 영상 분석 분야에서 축적한 전문 기술력을 토대로 ㈜미래로시스템에서 나노사업본부를 발족하였고, 국내 최초 주사전자현미경의 상용화에 성공했습니다. 전자주사현미경을 전량 수입에 의존하던 국내에 최초로 국산 SEM을 출시 하였으며, 국내 기업연구소 및 국공립연구기관, 대학교 등에 장비를 납품하는 동시에 해외시장에도 활발하게 진출하고 있습니다.

    ㈜새론테크놀로지는 최근 산업통상자원부 '첨단연구장비 경쟁력 향상 사업'의 지원을 받아 1.0㎚급 고분해능 전계방사형 주사전자현미경(FE SEM) 'SEMIRO-5000'을 개발하며, 국내 나노산업 발전에 지속적으로 기여하고 있습니다.

     


 Products

  • MINI-SEM AURA100/200
    고객사양의 실용적인 가격대를 지닌 Mini SEM- AURA Series 

    ...

  • MODEL

    AURA 100

    AURA 200

    lELECTRON OPTIC SYSTEM

    Resolution

     Tens nm @20KeV BSE Image Standard

    ~ 5.0 nm @ 20KeV / @ 30KV  SE/  4.0nm @BSE

    Magnification

    10 ~ 30,000X (Max), Digital Zoom 2X, 4X, 8X

    ~ 100,000X, Digital Zoom 2X, 4X, 8X

    Electron Gun

    Tungsten Hair-pin Filament

    Accelerating Voltage

    0.5kV~30kV

    Gun Alignment

    Auto Gun Alignment (Histogram)

    Bias System

    Linked with Acc. Voltage plus continuous voltage  control

    Image

    Secondary Electron Image SEI
    Backscattered Electron Image
    Color Optical Microscope Image (Option)

    Beam Scan Mode

    Search, Inspection, Photo (3step)

    Condenser Lens

    Electromagnetic 2 stages

    Electromagnetic 2 stages

    Objective Lens

    Electromagnetic 1 stages

    Electromagnetic 1 stages

    Stigmator

    8 Pole Electromagnetic Type

    8 Pole Electromagnetic Type

    Detector

    Photodiode type BSE detector

    Bar Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection)

    Image Shift

    150 um (X-Y), Image Rotation 360o

    Automation Function

    Auto-Focus, Dynamic Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current, Vacuum Control and etc.

    lDISPLAY

    Digital Image Scan

    Area Mode(640X480),                  Search Mode(640X480, 960X640, 1024X760)

    Inspection Mode(2048 X1536),      Photo Mode(4096X4096, 8192X6144)

    Digital Scan Speed

    High Scan Speed -- Max. 20f/s @ 1024X768 ( Live Image )

    l  IMAGE ANLYZER

    Image Analyzer
    Particle Counter

    Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/Filters/ ), Histogram, Excel

    Data, AOI(Area-of-Interest), Blob Analysis(Single/Multiple/Grouping ; Option)

    lSTAGE SYSTEM

    Movement (X/Y/Z) mm

    40/ 40/ 40mm

    40/ 40/ 40mm

    Tilt

    0~60° (Max)

    0~60°  (Max)

    Rotation

    360°  Endless

    360°  Endless

    Stage Motorization

    4-axis Drive Stage, Z-Adjustable

    3-Axis(X,Y,Z) Motorized Stage(Option)

    4-axis Drive Stage, Z-Adjustable

    3-Axis(X,Y,Z) Motorized Stage(Option)

    lVACUUM SYSTEM   (Low Vacuum System : Option)

    Vacuum

    High Vacuum  ; ~10-5 Torr,  Charge-up Reduction Mode

    Vacuum Control Type

    Full automation with safety system

    Vacuum System

    Rotary Pump + Turbo Pump

    lCONTROL SYSTEM

    Computer System

    Intel Pentium 4(Dual Co-Processor)

    Memory

    ≥ 1G MB, Control Data Interface

    Operation System

    Multi Tasking Window, Remote Control Function

    l OPTION

    BSE/  EDS (Energy Dispersive Spectrometer)/  EBSD/  WDS/ Nano Manipulator/  Optic or IR CCD and  Etc.

    ●  INSTALLATION ENVIRONMENT

    Temperature 22±2 oC (Fluctuation should be less than 5 oC) and Humidity should be below 70%

    Electric condition : Single phase, 220~230V AC  5KW, 60Hz

    Vibration :  3 um/sec Max.@ < 5~10Hz & EMI. The detail information is refer to Instruction Manual

  • FE-SEM SEMIRON5000
    Field Emission Scanning Electron Microscope
    국내 최초 FE-SEM - SEMIRON5000
    ...

  • 2014년형 SEMIRON 5000은 2000년대 초 Normal SEM국산화 이후로 꾸준한 기술 투자 및 열정으로 이룩한 (주)새론테크놀로지의 결과물로써, 축적된 자체 경통설계(electron  optic design) 기술을 기반으로 고안된 Schottky방식의 FE-SEM입니다. Normal SEM이 지니고 있는 분해능의 한계를 넘어선 선명한 영상을 구현하기 때문에 고배율에서의 표면 영상 관찰에 매우 유리한 장점을 지니고 있습니다. 또한 60도 conical 대물렌즈는 짧은 working distance 에서도 대면적 시료의 장착 및 이동을 자유롭게 구현하면서 고 배율의 선명한 영상을 확보할 수 있고, EDS 및 WDS 등의 분석기기를 장착함에 있어서도 최상의 성능을 구현할 수 있는 장점을 지니고 있습니다. 그 동안 FE-SEM 사용상에서 느끼고 있었던 유지 및 보수측면에서도 부담을 크게 줄일 수 있으므로 실질적으로 국내 첨단기술 개발 활용에 큰 도움이 될 것입 니다.

     -  60도 Conical  경통 적용  (대면적 시료 관찰 가능)

     -  고분해능 및 고해상도 영상구현 (High Pixel Resolution)

     -  초고속 주사처리 방식의 제어구동 드라이버 장착

     -  Multi Tasking Window 환경 구축

     -  Auto-Stepping에 의한 대용량 정보 저장 및 Filing 처리 가능

     - 강력한 image Processing기능, Analysis S/W 및 Measurement S/W 탑재

    MODEL

    SEMIRON 5000

    l ELECTRON OPTIC SYSTEM

    Electron Gun Source

     LaB6 Filament Cathode

    Resolution

    2.5 nm @ 30KeV SE/  2.0nm @BSE

    Magnification

    10 ~ 1,000,000X

    Image

    Secondary Electron Image SEI,  Backscattered Electron Image, TSEM(Option)

    Beam Scan Mode

    Search, Inspection, Photo (3step)

    Accelerating Voltage

    0.2kV~30kV (Possible Image Obtain)

    Bias System

    Linked with Acc. Voltage plus continuous voltage control

    Gun Alignment

    Auto-Gun Alignment (Histogram) cartridge

    Condenser Lens

    Electromagnetic 2 stages

    Stigmator

    8 Pole Electromagnetic Type

    Objective Lens

    60o Conical Object Lens (1 stage)

    Image Shift

    300um(X,Y), Image Rotation

    Detector

    ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection) & CCD Camera

    Automation Function

    Auto-Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current etc.

    Auto-stepping & Tiling, Auto photograph by pre-setting,

    Operation System

    Multi Tasking Window 환경의 GUI,  Remote Control Adjustment Function, etc.

    l DISPLAY

    Frame Memory &Scan Speed

    Area Mode (640X480),  Inspection Mode (960X640, 1024X768, 2048X1536)   

    Photo(2048 X 1536 ~ 8192 X 6144)    Possible Ultra High Pixel Resolution

    Max. 20 frame/sec.@ 1024 X 768

    l  IMAGE ANLYZER

    Image Analysis &
    Measurement S/W

    Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/ Filters/ Blob Analysis (Single/Multiple/Grouping), Histogram, Excel Data, Point Measurement, Various Image Filter, AOI(Area-of-Interest) and etc.

    l STAGE SYSTEM         Support Super Ultra High Pixel Resolution for paper work (Auto stepping Tiling)           

    Movement (X/Y/Z) mm

    60/ 70/ 65 mm                                 

    Tilt

    -20 ~ 60° (Max 90 °)

    Rotation

    360°

    Stage Motorization

    5-axis Manual Stage

    Standard  : 5-Axis(X,Y,Z) Motorized

    Auto-stepping & Tiling,  Navigation & Retrieval Positioning

    l VACUUM SYSTEM     (Low Vacuum System : Option)

    Vacuum

    High Vacuum Mode(~10-5 Torr) / Low Vacuum Mode  Option

    Vacuum Control Type

    Full automation with safety system

    Vacuum System

    Rotary Pump + Turbo Pump / Ion Pump

    l CONTROL SYSTEM

    Computer System

    Intel Pentium 4(Dual Co-Processor)

    Memory

    ≥ 2G , Control Data Interface

    Operation System

    Image Acquisition

    ● OPTION ITEMS

     

    BSE, EDS, WDS, EBSD, TSEM, Load-lock Chamber etc.

  • COMPACT SEM AIS 1800C/2000C
    High Performance in a cost-effective product
    Academic Version with Compact Design
    ...

  • MODEL

    AIS1800C (Compact Mini SEM)

    AIS2000C (Compact Normal SEM)

    lELECTRON OPTIC SYSTEM

    Resolution

     3.0 nm @30KeV SE /  4.0nm @BSE

    5.0 nm @20/30KeV SE

    Magnification

    10 ~ 200,000X (Max.)

    Digital Zoom  2X,4X, 8X

    10 ~ 300,000X

    Digital Zoom  2X,4X, 8X

    Image

    Secondary Electron Image SEI,  Backscattered Electron Image, TSEM(Option)

    Beam Scan Mode

    Search, Inspection, Photo (3step)

    Accelerating Voltage

    0.5kV~30kV (Possible Image Obtain)

    Electron Gun Type

    Tungsten Filament

    Bias System

    Linked with Acc. Voltage plus continuous voltage control

    Gun Alignment

    AUTO-Gun Alignment (Histogram) cartridge

    Condenser Lens

    Electromagnetic 2 stages

    Stigmator

    8 Pole Electromagnetic Type

    Objective Lens

    Electromagnetic 1 stages

    Image Shift

    150mm(X,Y), Image Rotation

    Detector

    ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection) & CCD Camera

    Automation Function

    Auto-Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current etc.

    lDISPLAY

    Frame Memory &Scan Speed

    Area Mode(640X480), Inspection Mode(960X640, 1024X768, 2048X1536)   

    Photo(2048 X 1536 ~ 8192 X 6144)    Possible Ultra High Pixel Resolution

    Max. 20 frame/sec.@ 1024 X 768

    l  IMAGE ANLYZER

    Image Analysis &
    Measurement S/W

    Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/ Filters/ Blob Analysis (Single/Multiple/Grouping), Histogram, Excel Data, Point Measurement, Various Image Filter, AOI(Area-of-Interest) and etc.

    lSTAGE SYSTEM   Support Super Ultra High Pixel Resolution for paper work (Auto stepping & Tiling )           

    Movement (X/Y/Z) mm

    40/ 40/ 40mm

    Tilt

    -20 ~ 60° (Max)

    Rotation

    360°

    Stage Motorization

    Standard :  5-axis Manual Stage

    Option     :  Additionally 3-Axis(X,Y,Z) Motorized Position Retrieval기능 장착

                       (Auto-stepping & Tiling Function for wide FOV & Ultra Pixel resolution)

    lVACUUM SYSTEM   (Low Vacuum System : Option)

    Vacuum

    High Vacuum Mode(~10-5 Torr) / Low Vacuum Mode  Option

    Vacuum Control Type

    Full automation with safety system

    Vacuum System

    Rotary Pump + Turbo Pump / Diffusion Vacuum System (Option)

    lCONTROL SYSTEM

    Computer System

    Intel Pentium 4(Dual Co-Processor)

    Memory

    ≥ 1G MB, Control Data Interface

    Operation System

    Image Acquisition

    ●    OPTION ITEMS

    Analysis Tool

     EDS, BSE & etc, /  TSEM Tool kit/ 3D reconstruction SW /  AR Tip/ Etc.