SOLAYL

Orsay, 
France
http://www.solayl.com
  • Booth: 4710


Advanced RF Power Diagnostics for Plasma Processes

A New RF Power Diagnostic
for Plasma Etching, Stripping and Deposition Applications

Advanced analog and digital RF vi probes

More than a simple plasma monitoring tool, SOLAYL provides a breakthrough innovation in RF measurement systems inside wafer processing equipments. Our RF VI probes are true plasma diagnostic tools allowing to detect ultra-fine changes during processing.


 Products

  • Vigilant Power Monitior (VPM)
    Advanced RF Power Diagnostic for Plasma Processing Applications (digital vi probe). ...

  •  Website: http://www.solayl.com/products/vigilant-power-monitor/

    The Vigilant Power Monitor tracks the RF power delivery in your plasma processing reactor by complete and accurate of RF parameters (power, voltage, current, phase shift, impedance, harmonics...) with minimum perturbation. This probe can be inserted before or after the matching unit inside your plasma system.

    We combine many proprietary innovations to offer what is probably the most advanced RF power diagnostics for plasma applications commercially available today:

    - Customizable high performance electrical sensors: wideband, robust, low-perturbation and compact voltage and current sensors developed through extensive experimental work and electromagnetic modeling. The characteristics of these sensors are customized during calibration to maximize performance for your application (maximized sensitivity and power rating while minimizing the perturbation).

    - High speed / high resolution cutting edge acquisition electronics with USB connectivity to sample directly and simultaneously the RF voltage and current waveforms.

    - Automated highly accurate calibration process to ensure the best measurement accuracy and probe-to-probe repeatability. Our calibration process is NIST-traceable and uses the best electronic test instruments available today in a temperature and EMI controlled environment.

    - Powerful and intuitive user interface software (Vigilant RF Lab) to display in real-time the measured data which transforms the PC of the user into a state of the art RF laboratory.

  • Vigilant Sensor (VSN)
    RF Voltage-Current Probe for Plasma Processing Applications (analog vi probe) ...

  • Website: http://www.solayl.com/products/vigilant-sensor/

    The Vigilant Sensor uses two innovative sensors to achieve accurate simultaneous measurements of both the voltage and current waveforms with a minimum perturbation.  It delivers two analogs signals optimized for analysis by your test instrument (oscilloscope, spectrum analyzer). This analog vi probe can be used before or after the matching unit inside your plasma system.

    We combine many proprietary innovations to offer what is probably the most advanced analog RF voltage-current probe commercially available today:


    - Customizable high performance electrical sensors: wideband, robust, low-perturbative and compact voltage and current sensors developed through extensive experimental work and electromagnetic modeling. The settings of these sensors are customized during calibration to maximize performance for your application (maximized sensitivity and power rating while minimizing the perturbation).

    - Automated highly accurate calibration process to ensure the best measurement accuracy and probe-to-probe repeatability. Our calibration process is NIST-traceable and uses the best electronic test instruments available today in a temperature and EMI controlled environment. Each probe is provided with its own certificate of calibration. The calibration is performed with the non-detachable signal cable.

  • Vigilant RF Lab (VLA)
    RF Lab Software for Plasma Processing Applications ...

  • Website: http://www.solayl.com/products/vigilant-rf-lab/

    Power

    • Dissipated power
    • Forward power
    • Reflected power

    RF Pulses

    • Average & peak power
    • Envelopes of power, voltage, and current pulses

    Voltage & Current

    • Waveforms
    • Min, Max, RMS, Peak-to-peak values

    Impedance

    • Module & Phase
    • Resistance & Reactance
    • Equivalent circuit
    • Smith Chart

    Harmonics

    • Harmonics analyzer