Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processing equipment. AG Associates was the dominant manufacturer of RTP systems in 1990’s. The Heatpulse are still being used around the world in manufacturing, R&D and Universities. These systems have a proven track record for reliability and simplicity.
The AccuThermo AW610 was derived from the AG Associates 610 production-proven design. Allwin21 Corp. is the exclusive manufacturer of the AG Associates Heatpulse 610 desktop atmospheric RTP (Rapid Thermal Processing) system. The system uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1‑600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.
Key Features of AccuThermo AW 610:
35 years’ production-proven Real RTP/RTA/RTO/RTN system.
Scattered IR light by special gold plated Al chamber surface.
Allwin21 advanced Software package with real time control technologies and many useful functions.
Consistent wafer-to-wafer process cycle repeatability.
Top and bottom High-intensity visible radiation Tungsten halogen lamp heating for fast heating rates with good repeatability performance and long lamp lifetime.
Cooling N2 (Or CDA) flows around the lamps and quartz isolation tube for fast cooling rates
Elimination of external contamination by Isolated Quartz Tube
Up to six gas lines with MFCs and shut-off valves
Made in U.S.A.
Allwin21 Unique Technologies for the best performance (Repeatability, Uniformity,Stability) of desktop RTP.
- Derived from the AG Associates 610
- Special Aluminum Chamber with gold plating surface
- Special TOP AND BOTTOM Lamp Assembly Structure
- 0.02” Dia “K” Type Thermocouple.
- Bare, Beaded touch
- Patented ERP Pyrometer, Non-contact -Option
- Isolated quartz tube, thickness 0.125” only
- Different quartz tray for different substrate
- Quartz Liner Plate -Option
- Multiple gas lines with MFCs -Option
- Proven Carriers / Susceptor -Option
- Proven Slip Free Ring -Option
- Advanced AW Software with many functions
- Precise and Rapid Control
- Real Time Control
- Easy Allwin21 Pyrometer Calibration method
- Programmable RTAPRO software Calibration
- Advanced PID Control
- PowerSum function
Other RTP Models from Allwin21 Corp.
- AccuThermo AW 410
- AccuThermo AW 810
- AccuThermo AW 820
- AccuThermo AW 610V
- AccuThermo AW 820V
Please contact us by email for more info. We appreciate your time.
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