Neo Engine（New Electron Optical Engine）
Newly developed functionality that integrates lens control system and automatic technology, "Neo Engine" (New Electron Optical Engine) is a standard feature. Even though electron optical condition is changed, there is neglegible change in beam alignment, allowing for fast and easy image acquisition at any accelerating voltage and probe current.
The system is the premier example of the advanced JEOL’s electron optics technology.
①Improvement of automation function
Specimen: Cross section of mineral (resin-embedded) milled by CP, Acc. Vol.: 5kV, Detector: RBED, Magnification: ×100,000
Auto function provides auto focus adjustment with in a few seconds.
②Improvement of Magnification accuracy
Specimen: Specimen for metrology (MRS5), Acc. Vol.: 10kV, Magnification: ×50,000
Magnification accuracy is highly improved and high accuracy size measurement is available.
③Improved usability of energy filter mode
Specimen: Name card, Acc. Vol.: 15kV, Detector, UED, Magnification: ×3,500
Even though energy filter range is changed, there is minimal change in field of view and focus.
GBSH-S(GENTLEBEAM™ Super High resolution Stage bias mode)
GBSH is a method which improves spatial resolution at any accelerating voltage.
Maximum 5kV bias voltage to sample stage is available by newly developed GBSH-S.
※GENTLEBEAM™ is the function which decelerates illuminated electron beam and accelerated electron signal using biased voltage for sample.
New Backscattered Electron Detector
The newly developed ultra high sensitive backscattered electron detector provides us clear contrast image. Detector sensitivity is highly improved and high compositional contrast image can be observed at low accelerating voltage.
Sample: Cu cross section, Incident electron: 3kV, Magnification: ×10,000, WD: 4.5 mm
New appearance design implements compact footprint.
This offers additional flexibility for instrument installation.
New Sample Exchange method
Newly designed sample exchange system (load lock type) is applied.
Simple operation provides enhanced ease of use and improves through-put and durability of the instrument.
High through-put and reliable sample exchange system is available for beginner users and experienced users.
SMILENAVI is an operation navigation system designed to assist novice users to quickly and efficiently learn the basic operation of the instrument.
When a button shown in the SMILENAVI is clicked, the corresponding button is emphasized to clearly show the location of the button for the next operation.
When you hover the mouse pointer over a button on SMILENAVI, a frame is displayed on the corresponding button on PC-SEM.
When a button on SMILENAVI is clicked, the screen is grayed out except the corresponding button on PC-SEM.
When a button of hardware key on SMILENAVI is clicked, the picture of operation panel and the hardware key are displayed.
Inherited High Performance
In-Lens Schottky Plus Electron Gun
In-Lens Schottky Plus Field Emission Electron Gun implements higher brightness by improving combination of electron gun and low aberration correction condenser lens.
This allows the user tp-obtain probe current from a few pA to a few decades nA even at low accelerating voltage. The system provides users high resolution observation, high-speed element mapping and EBSD analysis.
ACL (Aperture Angle Control Lens)
ACL is attached above the objective lens and optimizes electron beam convergence angle in all range of probe current automatically. Hence, probe diameter is always minimized because illuminated electron beam’s convergence angle is adjusted automatically even though probe current amount is changed. It’s possible to collect both high resolution images and microanalytical data smoothly even though probe current is widely changed.
Super Hybrid Lens
JEOL’s developed superimposed electrostatic / magnetic field lens type objective lens, "Super Hybrid Lens" as standard, provides us ultra high spatial resolution observation and analysis for any type of samples including magnetic and non-conductive sample.
Maximum 4 detectors’ simultaneous signal acquisition is available.
A Lower Electron Detector (LED) and Upper Electron Detector (UED) are standard, in addition, a Retractable Backscattered Electron Detector (RBED) and an Upper Secondary Electron Detector (USD) are available as optional items.
High Spatial Resolution Observation
GBSH (GENTLEBEAM™ Super High resolution mode) provides us high spatial resolution images at ultra low accelerating voltage.
※GENTLEBEAM™ is the function which decelerates illuminated electron beam and accelerates discharged electron signal using biased voltage for sample.
Low vacuum function
Low vacuum function can provide us observation and analysis of non-conductive sample without conductive coating easily and with high spatial resolution.