Ansung-Si,  Gyeonggi-Do 
Korea (South)
  • Booth: A548

Gas Abatement System

MAT Plus is environmental technology company founded in 1995 guided by its mission of creating a comfortable environment for next generation.We offer the world’s top technologies in areas ranging from environmental pollution prevention system for semiconductors and LCD to gas abatement systems and waste treatment facilities for general industries. MAT Overseas office are Taiwan, Singapore,Malaysia, and China.


  • FCTO700W
    FCTO700W is High Temperature Catalyst Combination system that combines flameless catalytic thermal oxidation and wet treatment technology in one system to abate flammable, water soluble gases and NF3 Simutaneously with high efficiency....

  • This system maintains the catalyst zone at a high temperature uniformly by electric heater and waste gas reaction heat without combustion of additional fuel(LNG), and thermal NOx is rarely generated.

    And the power and water soluble gases which can be generated during thermal oxidation will be captured by multi-stage wetting Zone

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

For Technical Support with this webpage, please contact support.