Pfeiffer Vacuum

Asan-si,  Choongcheongnamdo 
Korea (South)
  • Booth: D130

We provide the perfect vacuum solution!

Pfeiffer Vacuum offers diverse vacuum solutions suited to the Korean market and committed services worldwide. The factory in Asan with manufacturing line of dry pumps and fully skilled engineers guarantees punctual delivery, reliable technical support and devoted R&D investment for any of your needs. Pfeiffer Vacuum always endeavors for customer-oriented technology and services.  

Our co-exhibitor Nor-Cal Products, Inc., now a division of Pfeiffer Vacuum Technology AG, is a trusted global source for vacuum chambers, components and hardware. Processes that rely on their vacuum components include semiconductor, thin film, display, nanotechnology, surface analysis, research applications, and emerging technologies such as PVD and PECVD and the Internet of Things. Quality culture embraces continuous improvement.  


  • ASM 392 mobile high-performance leak detector
    Mobile leak detectors optimized for rapid pump down and short response times on large test objects ...

    • 35 m3/h (21 cfm) roughing capacity using frictionless and oil free ACP pump
    • 25 l/s helium pumping speed to shorten the time to test
    • 20 hPa crossover pressure for a rapid entry into measurement mode and additionnal massive mode for large leaks
    • Color touch panel display with full 360° viewing offering excellent visibility
    • Intuitive menu with password protection to prevent from unintended use
    • Available with interface board for automation through an external system (PC or PLC)
  • A4 multi-stage Roots pumps series
    A4 series dry pumps to address harsh semiconductor and coating applications...

    • High energy efficiency due to multi-stage Roots technology, high efficiency motors and limited use of electrical heaters
    • Wide operating temperature range protects the pump against precursor cracking or condensable deposition
    • High mean time between failures and low cost of ownership
    • High particle tolerance increases tool uptime
    • Extended monitoring functionalities for accurate control of pump operating conditions and idle mode capabilities
    • Semi S2-0712 and UL 61010 compliant

  • ATH 1600 – 3204 M turbopumps
    Turbopumps with 5-axis magnetic levitation...

  • Clean vacuum thanks to lubricant-free magnetic bearings

    - Very high gas throughput for all process gases

    - Outstanding long-term stability and reliability

    - High backing pump compatibility

    - High air ingress stability

    - Low lifetime costs due to maintenance-free technology

    - Freely selectable rotation speed in a broad RPM range for optimized process customization

    - Ultra-low noise and vibration

    - Can be installed in any orientation

  • A 200 L multi-stage Roots pump
    Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market ...

    • Top performance and unrivaled throughput

    • The lowest footprint of its class and dual inlet position

    allow for easy system integration

    • Energy-efficient and cost-saving

    • High cleanroom compatibility thanks to low noise and
    • vibration levels

    • Integrated self-monitoring system

    • High reliability, no on-site preventive maintenance required

  • HiPace 1200 - 2300 turbopumps
    Hybrid bearing turbopumps in the pumping speed class of 1,000 to 2,000 l/s...

  • Four sizes with pumping speeds from 1,000 to 2,000 l/s

    - High pumping speed for light gases and heavy gases

    - High gas throughput, even for heavy gases

    - Installation position 0° to 90° and 90° to 180° available

    - Integrated sealing gas system with throttle and valve

    - Wide voltage range: 90 to 265 V

    - Interfaces: RS-485, remote, Profibus or DeviceNet optional

    - SEMI S2-compatible, UL, CSA and TÜV certification

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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