FST

Hwaseong-si,,  Gyeonggi-do 
Korea (South)
http://www.fstc.co.kr/eng/
  • Booth: D716


Welcome to visit our site and we appreciate!

Since its establishment in 1987, FST has been committed to supplying high quality products to high-end semiconductor and FPD industries. We have achieved continuous growth in Pellicle business, one of main material used in semiconductor or FPD manufacturing process - and Chiller which controls temperature and humidity of various equipment. FST also innovates self-developed optical inspection systems and secures competitiveness in the newly developing semiconductor related products.

With its 28 years of company history, FST has made every effort to meet customers’ expectation and striven for developing the technologies. Our focus is to be the most competitive supplier in the global market with our differentiated and uncompromising quality and services.

FST will always do its best to improve the value of products and services in the highest form for customers’ satisfaction.


 Products

  • Pellicle
    A pellicle is a thin membrane stretched over an aluminum frame and glued to the photomask to protect it from contaminants, such as particles. ...

  • Definition & Usage

    A pellicle is a thin membrane stretched over an aluminum frame and glued to the photomask to protect it from contaminants, such as particles. Even if particles sit on the membrane, they are not printed on the wafer because they are out of focus during the exposure from the lithography process. 

    Purpose of Use

    • To improve the yield rate of IC chips
    • To extend the cleaning period of the photomask
    • To protect the photomasks from contamination
    • To extend the lifetime of the photomask
    • To isolate sources of contamination

  • Chiller
    The Chiller of FST is an equipment that improves process efficiencies by constantly maintaining inside-chamber wafer and its surrounding temperatures, through the excessive heat produced in semiconductor etching process....

  • The Chiller of FST is an equipment that improves process efficiencies by constantly maintaining inside-chamber wafer and its surrounding temperatures, through the excessive heat produced in semiconductor etching process. As the process becomes more micro and solid, continuous development of Chiller is requested for more customized equipment supply. Accordingly, products of various fundamental technology and design technology basis are being manufactured.

    • Thermoelectric Chiller
      • Momentary Power Outage Resistance (Power Vaccine) 
      • High Efficiency(Hiper) TEM & Block 
      • Compact Size & User-friendly Structure 
      • High Accuracy & Fast Response Temperature Control (±0.01℃) 
      • IGBT Circuit, Non-defective SMPS 

    • Compressor-type Chiller
      • High-reliability Refrigeration Components and Cycle 
      • Low Noise, Low Power Circulation System (50% Reduction) 
      • Momentary Power Outage Resistance (Power Vaccine) 
      • Energy-saving Refrigeration System (60% less power) 
      • Seismic & Vibration-resistance Design 

    • Heat Exchanger
      • High-reliability Components and Sensors 
      • Low Noise, Low Power Circulation System (50% Reduction) 
      • Momentary Power Outage Resistance (Power Vaccine) 
      • Precision Control 3-Way Valve (±0.01℃) 
      • Seismic & Vibration-resistance Design 

    • Cryogenic Chiller
      • High-reliability System under Cryogenic Condition (Dew condensation, Freezing Prevention) 
      • Rapid Cooling and Maintaining (20 ▶ -80℃, 10min.) 
      • Momentary Power Outage Resistance (Power Vaccine) 
      • Special Refrigeration System Extra Low Temperature (7kW@-70℃) 
      • Seismic & Vibration-resistance Design 

    • THC (Temp & Humidity Controller)
      • Energy Saving Refrigeration System (60% Reduction) 
      • Temperature / Humidity Stability (±0.01℃ / ±0.2%)        
      • Momentary Power Outage Resistance (Power Vaccine) 
      • DI Supply Stabilization System 
      • Seismic & Vibration-resistance Design 
  • EUVO ™ (EUV Light Generation System)
    Light source fabrication technology of EUV (13.5nm) wavelength...

  • EUVO100 TM (Extreme Ultra Violet Oscillator) is based on High-order Harmonic Generation driven by ultra-fast laser. The system has excellent coherence, low divergence, tunable wavelength, and table-top size footprint. It is compact, easy to use, reliable, and cost effective EUV light sources. It is uniquely suited for Infrastructure of EUV Lithography and its applications. 

    • Main Features
      • Ultra fast drive laser
      • Vacuum system
      • Laser beam position stabilizer
      • Status monitoring
        • Laser parameter
        • EUV beam
      • Various phase matching control
        • Optic control
        • Laser parameter
        • Gas cell geometry
        • Laser & gas cell interaction
        • Adaptive wave-front of the driving laser pulse
    • Application
      • EUV transmittance measurement system
      • EUV interferometer
      • Mask detect review system
      • Coherent scattering microscopy
  • CD Meter (CD Meter Measurement System)
    CD Meter equipment, the system is purposed in measuring the critical dimension of 6th generation midsize OLED panels....

  • CD Meter equipment, the system is purposed in measuring the critical dimension of 6th generation midsize OLED panels. It is used in the patterning process of the OLED manufacturing process.
    The system is capable of performing CD metrology for the line thickness as well as the shape and size of the round pattern. Full automation is also supported. The measured CD values can be used as a parameter for process control and brings benefit to overall yield of the manufacturing process.

  • Mechanical Dicing Saw
    The dicing saw uses a high-speed spindle with blades to dice, cut or groove wafers, silicon, glasses, ceramics and many other types of materials....

  • The dicing saw uses a high-speed spindle with blades to dice, cut or groove wafers, silicon, glasses, ceramics and many other types of materials. Fully automatic dicing saws can perform the entire process sequence: loading from the cassette, alignment, dicing, cleaning, drying and unloading to the cassette automatically. FST Fully automatic dicing saw is a facing dual-spindle configuration with 17” touch panel with a easy User interface.

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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