High Integrated Technology, Inc.

PyeongTaek-City,  Gyeonggi-Do 
Korea (South)
http://www.hitinc.co.kr
  • Booth: A544


It will be enterprise which think first.

Designs and manufactures Wet station & FPD cleaner, D.I water heating systems, and related equipment in the field of semiconductors. 

Equipment: Wet Station, Tube Cleaner, Parts Cleaner, D.I Water heating system, Overseas product Gas Detector, Chemical Circulator, Leak & Level Sensor, etc.

Gas Business : specialty gas & utility piping, engineering & management,

Jungle box & gas panel manufacturing and installation in the field of LCD & semiconductors


 Products

  • Chemical Circulator
    Direct circulation type chemical isothermal device indispensable for wet process b contamination free in-line type cooling/heating unit....

  • Chemical Circulator는 RCA 세정과 습식 식각에 쓰이는 화학 약품의 정확한 온도 조절에 사용한다.
    이것은 반도체 제조의 습식 공정에 폭넓게 사용되는 없어서는 안 될 요소이다.
    이 Chemical Circulator는 최근 화학약품의 다양화와 더 높은 메가비트들의 청결함 요구의 증가를 충족시키기 위해 새롭게 소개되었다.
    *고온 화학품의 사용에는 CS-Heater를 권합니다.

    이용 예시

    모델 사진

    사양

  • GD-70D
    GD-70D series is a gas detector head to detect toxic gas, oxygen, and combustible gas generated at semiconductor and liquid crystal factory, etc....

  • 특징

    모든 검지 방식에 대한 공통 플렛폼 (본체/센서/센서) 
    다기능적인 센서 유닛 (New Intelligent Sensor)  
    내부 튜브 / 코일 없음  
    전면에서 유지보수 / 공구 불필요 / 손쉬운 센서 및 펌프 교체 
    다양한 통신 방식 (4~20mA, NT, PoE)  
    향상된 트러블슈팅 펌웨어 기능을 통한 최소한의 유지보수 비용

    적용

    태양전지, 반도체 및 LCD산업용 가스 검지 모니터링

    사양

    카테고리 고정식 가스 검지기
    타입 독립형 가스 검지기
    검지 가스 독성, 가연성, 산소
    검지 원리 센서 유닛에 따라 변동
    샘플링 타입 흡입식
    알람 디스플레이 1차 알람 / 2차 알람 / 트러블 알람
    인증 RoHs, CE
    전원 DC24V±10%, 약 1.5W (센서 유닛 포함 최대 4W)
    주석 : 약 2.5W (SGU 센서 유닛 포함 최대 5W)
    치수 & 무게 70(W) x 120(H) x 150(D) mm, 약 0.9kg
    동작 온도 & 습도 0 ~ 40℃, 30 ~ 80%RH (응결 없이)
  • GD-D58 series
    Drawing pump of large flow rate built-in. Flow rate decreasing detector sensor installed. Easy maintenance owing to unitizing components to be exchanged periodically....

  • 사양

    검지 가스 가연성 가스
    방폭 구조 내압 방폭구조
    인증 ATEX, CE, TIIS
    치수 & 무게 약 197(W) X 286(H) X 140(D)mm, 약 5.8kg
  • Wet Station
    Wafer 표면 세정 설비로 다양한 공정에 대응 가능 하다...

  • ■ HWC-ACP (Auto Wet Station)

     - Wafer 표면 세정 설비로 다양한 공정에 대응 가능 하다
     - Wafer Size ++: 150mm ~ 200mm [ 2Cassette Type ]
     - Process Direction : From left to right / From right to left
     - Robot System : 2 ~ 4set [ Robot safety interlock ]
     - Front Door : Slide open type
     - Chemical Supply : CCSS or LCSS type
     - Control method : PC or PLC control / Scheduler control
     - Application field

           RCA cleaning                    Particle removal

           Nitride film removal         Oxide film removal

           Polymer removal              Resist Strip Station

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