AMETEK Korea Co., Ltd.

Suwon-si,  Gyeonggi-do 
Korea (South)
http://www.ametek.com
  • Booth: C136


Welcome to Diverse AMETEK solutions - Metrology & Analysis

AMETEK, Inc. is a leading global manufacturer of electronic instruments and electromechanical devices. AMETEK has 17,000 colleagues at more than 150 operating locations, and a global network of sales, service and support locations in 30 countries around the world.

We would like to introduce diverse solotions from 5 business units at this show.

1) In-line & Near Fab solution for trace elements' dose quantity and distribution measurement in thin films (CAMECA)

2) Trace element & Isotope analysis - HR ICP-MS, MC ICP MS, GD-MS, SIRMS, TIMS (NU Instruments)

3) Active & Passive floor vibration control solution for Fab and Lab (TMC)

4) UHP tube and Heat Exchanger for high purified chemical (CPD)

5) Motion control solution (Leadscrew, Motor, etc) (Haydon Kerk-Pittman)


 Products

  • TMC STACIS III Active Floor Vibration Cancellation
    STACIS III systems cancel vibrations in real time by continuously measuring floor activity, then expanding and contracting sophisticated piezoelectric actuators to filter out floor motion....

  • STACIS® III is a flexible advanced active vibration isolation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

     

    Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.

     

    STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

     

    The unique serial design and proprietary high-force piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.

     

    Visit https://www.techmfg.com/products/stacis/stacisiii to learn more.

  • Sigray : AttoMap
    AttoMap system was designed as the laboratory analogue of a synchrotron x-ray microanalytical microscope. With the patented x-ray source and optics, AttoMap achieves world highest spatial resolution and sensitivity in the elemental mapping of microXRF....

  • Sigray’s AttoMap™ microanalytical system provides a breakthrough in lab-based microXRF performance, bringing synchrotron capabilities to individual laboratories. The AttoMap™ relies on several major innovations, including Sigray’s patented high brightness microstructured x-ray source and high efficiency x-ray optics. The instrument provides fast, non-destructive elemental mapping at resolutions of <8 μm, relative sensitivities of sub-ppm, and absolute detection levels of sub-femtogram.

    COMPARE TO LEADING CONVENTIONAL MICRO-XRF:

    1. Highest resolution: 3-5 um MTF, <8 um spot

    2. Highest sensitivity: sub-ppm & sub-femtogram

    3. Fastest: single minute vs. half a day for equivalent measurements, with up to 100X throughput
    4. Most accurate quantification, due to achromatic focusing
    5. Superior sample flexibility for large and heavy samples or uneven sample surfaces

    6. Correlative capabilities within a single system (includes 2D x-ray microscopy and optical microscopy)

    TECHNICAL INNOVATIONS FOR SYNCHROTRON PERFORMANCE :

    1. High brightness x-ray source with 50X brightness of microfocus sources used in conventional microXRFs

    2. Paraboloidal x-ray optics with major advantages over conventional polycapillary microXRF systems

    3. Unique detector geometry with 3-4X collection angle than conventional systems

  • Haydonkerk-Pittman : Linear Actuator
    Two types of Haydon Linear Stepper Motors : Can-stack Linear Actuator Stepper Motors, and Hybrid Linear Actuator Stepper Motors....

  • Haydon Kerk Motion Solutions offers a unique line of hybrid stepper motor linear actuators that open new avenues for equipment designers who require high performance and exceptional endurance in a very small package. These high-performance hybrid actuators directly drive a rotor drive nut on a stainless steel precision acme lead screw. This patented interface reduces tolerances and noise while increasing efficiency and durability over v-thread and bronze nut configuration commonly used in other linear actuators.  Actuators are available in captive, non-captive and external linear configurations.  

    Haydon Kerk Motion Solutions offers a full range of can-stack linear actuators from 15 to 46 mm in size with a wide range of force outputs.  The Haydon™ brand of can-stack stepper motor linear actuators provides both a broader range and, for a given size, significantly higher thrust than previously available from mini-steppers. Haydon Kerk Motion Solutions patented design accepts a larger rotor than conventional units, improving efficiency and eliminating the need for massive heat sinks. Unique features impart ruggedness and reliability that assure long life and consistent performance. Rare earth magnets are available for even higher thrust. All units are built with dual ball bearings for greater motion control, precise step accuracy and long life.  All stepper motor linear actuators can be customized for application specific needs.
  • CAMECA - AKONIS
    In-line, fully-automated SIMS tool providing on-the-fly composition measurements directly in the semiconductor fab lines. - Epitaxial (SiGe, SiP) & implant process monitoring - Blanket & patterned wafer analysis in pad down to 35µm - SEMI compliant...

  • AKONIS

    The new in-line, fully-automated SIMS tool from CAMECA: high quality SIMS data without need of SIMS experts.

    The new AKONIS platform fills a critical gap in the semiconductor fabrication process by providing a fast tracking of compositional changes and conformity directly in the fab line.

    Complementing the IMS Wf / SC Ultra as well as the SIMS 4550 (quadrupole SIMS) currently used to support the semiconductor industry via off-line characterization labs, AKONIS is the only in-line, fully automated Secondary Ion Mass Spectrometer (SIMS) that enables high precision SiGe and SiP process monitoring with no compromise on analytical sensitivity.

    AKONIS benefits from the most recent development in EXtremely Low Impact Energy (EXLIE) ionic column technology, coupled with a full wafer handling system including a high-resolution stage which permits to address process nodes down to 5nm. Compliant with all automation requests of modern 300mm fabs, the tool provides almost instantaneous composition and doping information in the most complex stacks. Other capabilities include: blanket and patterned wafer measurements in pad down to 35µm. Intuitive recipe creation making SIMS data accessible to non-experts.

    Bringing the new AKONIS SIMS tool to the line proves time saving and cost effective: production stands are made shorter as no time is spent waiting for data, and the number of misprocessed wafers is reduced by more frequent monitoring.

    For more information, contact cameca.info@ametek.com

  • NU Instruments : Astrum ES
    The Astrum ES is a double focussing sector field glow discharge mass spectrometer designed for the precise and accurate determination of sub-ppb to matrix elements in a single scan....

  • Glow discharge mass spectrometry (GD-MS) is recognised as one of the ultimate techniques for the characterisation of conductive and non-conductive materials. It is capable of quantifying virtually all elements from lithium to uranium, and from matrix to sub part-per-billion.

    The Astrum ES is utilised in a variety of applications areas including high purity metals, semiconductor materials, substrates and aerospace materials. The Astrum ES is capable of analysing conductive, semi-conductive and non-conductive materials using both flat and pin cell geometries, depending on whether surface analysis, depth profiling or bulk-type analysis is preferred.

    The Astrum ES from Nu Instruments combines a glow discharge ion source with a high-resolution mass spectrometer and is a major step forward in GD-MS, from the cryo-cooled tantalum source/cell and rapid sample changeover system through to the bespoke control software. The durable construction of the instrument and proven source design give maximum uptime with minimal intervention.

    Main Features

    • Glow discharge source based on proven technology

    • Reduced flow static discharge for maximum stability

    • Tantalum cell construction for ease of cleaning

    • Pin and flat sample configurations for maximum analytical flexibility

    • Easy sample changeover using a unique loading probe

    • Cryo-cooled source for analysis of low melting point samples and minimisation of background gases

    • Double-focusing mass spectrometer, based on field proven technology

    • Variable high-resolution capabilities from 400 to > 10000 (10% valley definition)

    • Faraday and ion counting multiplier for wide dynamic range

    • Determination of matrix to sub-ppb elements in a single scan

    • Purpose built electronics with monitoring of all instrument parameters

    • Unique pumping configuration

    • Bespoke software with intuitive instrument control and data analysis

    The primary application of the Astrum ES GD-MS is the characterisation of high purity material whether it be nickel superalloys for the aerospace industry, copper and silicon for the semiconductor industry, or gallium for the ever-developing LED business.

    Semiconductor Industry

    There is a burgeoning interest in the use of HR GD-MS for semiconductor materials such as silicon and sapphire. This is driven not just by the semiconductor industry but also by the demand for solar cell silicon, wherein the purity of the silicon has a direct correlation with the solar cell performance.

    Production of virtually all electronic, optical and electro-optical devices requires high-purity semiconductors. The electrical properties of these semiconductors are dependent on the impurities present in them and only extreme low levels of impurities are permitted in these metals to guarantee the performance of the end product such as microprocessors and other micro devices. GD-MS also helps in bulk survey analysis of these semiconductors to identify the amount of impurities even at the trace and ultra-trace levels.

    Pure Metal Industry

    In large scale production of metals and alloys the total trace impurity is not well controlled. However, in order to control its mechanical, chemical and electrical properties, controlled doping with trace elements and purification to reduce the presence of unwanted materials is required. GD-MS helps in identifying the impurities in the finished product, thereby ensuring the quality and performance of the system where these metals are used.

    Alloy Industry

    Alloys and Super Alloys are the key materials for the manufacturing of high-performance machinery such as turbines. As these types of machinery often work under very high temperature and pressure, even a slight change in composition of the trace elements can have undesirable results. GD-MS is ideal in identifying these elemental compositions in the product to ensure the best performance of the system.

    Contract laboratories use GD-MS analysis for materials characterisation and the Astrum ES design has been greatly influenced by their requirements. In some cases, these can be the most demanding users, with regular changes in sample matrix and sample quality. The Astrum is the benchmark for achieving the best data quality with the lowest detection limits and running costs.

  • CPD : XXP280 UHP Heat Exchanger
    Ultra-High Purity High Performance Heat Exchanger for Semiconductor Acid Cooling...

  • AMETEK CPD’s new XXP280 Heat exchanger is the latest technology for heating and cooling, corrosive and ultrapure chemicals. The heat exchanger’s 100% fluoropolymer construction and rugged design will allow precise temperature control in extreme environments where others fail. Its unique honeycomb design allows for exceptional heat transfer rates while maintaining a high-pressure capability and compact size.

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