JUSUNG Engineering Co., Ltd.

Gwangju-si,  Gyeonggi-do 
Korea (South)
  • Booth: D330

Think for the 1st. Work for the No.1

JUSUNG Engineering Co., Ltd., incorporated 1995, is one of the leading equipment makers in global semiconductor, FPD and solar cell markets. With the addition of the new MOCVD line for LED development, we currently have four major business areas and are living up to our ideal to offer the "World's BEST Products". With a leading RDC enteroccupied by the most qualified professional sin the industry, we currently hold more than 1,500 patents. While continuing to produce world leading equipment, we are maximizing the synergy effects thenter the next generation renew able energy business.

 Press Releases

  • - TSD System 통해 High Quality 막질 구현 및 공정 미세화에 선제 대응

    반도체, 디스플레이 및 태양광 제조장비 전문기업인 주성엔지니어링(대표 황철주, 036930)이 23일부터 3일간 코엑스에서 열리는 국제 반도체 장비재료 전시회(세미콘코리아 2019)에 참가,

    차세대 반도체 핵심장비인 TSD System을 선보인다고 밝혔다.

    주성엔지니어링이 공개한 'All In One(Thermal ALD + PE ALD + Thermal IPT) 기반의 TSD System(Time Space Divided)'은 시분할 컨트롤을 통한 High Quality 막질 구현이 가능하여
    10나노급 이하 초미세 D램(DRAM), 3D 낸드(3D NAND Flash Memory) 및 CMOS 등 차세대 반도체 핵심공정에 선제적으로 대응 가능한 장비이다.

    'TSD System'은 주성이 개발한 LSP(Local Space Plasma) 전극 기술을 활용해 단차피복(Step Coverage) 비율 및 박막의 응력(Stress) 조절이 가능한 것이 특징이며 고순도(PURE) 막질을 정밀하게 구현할 수 있어 선폭이 더욱 좁아지고 패턴 내부 구조가 복잡해지는 ‘반도체 공정 미세화’ 에 필수적으로 요구되는 혁신적 기술이다.

    또한, 시분할 조정을 통해 Source, Purge, 반응가스 등의 노출시간을 자유자재로 컨트롤하여 사용자가 원하는 Recipe를 유연하게 적용할 수 있고 공정 Window가 넓어 Application의 변화 및 공정 미세화 컨트롤에 능동적으로 대처가 가능하다는 장점이 있다.

    주성엔지니어링 관계자는 “향후에도 공정 및 하드웨어 혁신을 통해 빠르게 변화하는 반도체 산업에서 높은 경쟁력을 유지할 것이며, 제품포트폴리오 다각화를 통한 반도체 매출 증대에도 힘쓸 것”임을 밝혔다.,


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