Etching/Deposition Profile and Plasma Simulator Provider
Since Kyungwon Tech was established in 1998, we has been providing comprehensive consulting services in the field of computational fluid analysis and plasma processing. We have developed our engineering software K-SPEED (3D feature profile simulator for plasma process) and FanDAS (simulator for design optimal fan shape). We are also providing consulting services as a domestic distributor of SimericsMP, Barracuda, EnSight, and CFturbo.
Kyungwon Tech has worked for numerical simulation of plasma processing of microelectronics industry and commercialized 3D etching profile simulator in 2013, K-SPEED, focusing on deep etching of semiconductor process. Due to the unique plasma reaction data of C4F6, C4F8, and other gases, it has given insight of semiconductor etching process and made a good success, which was not available in the past. It can be applicable to other etching and CVD processes in the future.