Neo Dry Series
Small air-cooled dry vacuum pump
Maintenance cycle ; Once in 3 years!
No oil smoke, No chamber contamination!
No Tip-seal replacement, No performance, No particles!
Hassle free to replace rotary/scroll pump!
Condensation-prone gas, like water vapor or solvent, available!
By virtue of inverter,frequency does not affect to performance!
Low noise,low vibration!
Standard type for harsh process(Large Capacity)
Available up to 200kL/min.
Best for large wafer adn FPD.
Durable to various processes.
Roots dry pump achieved smallest energy consumption & footprint in the category.
Applicable for various tools.
Best for clean pumping such as L/L and transfer chamber, etc.
Available to large size wafer &FPD
- Large capacity available by combination.
-Larger than 150kL/min also available dn demand.
-Large capacity around atm.pressure can achieve high speed pumping best for large L/L chamber.
pumps for solvent evacuation are also line-up