The G5+ series, latest generation of COMPACT sorters from RECIF Technologies, is the standard solution for 300mm silicon wafers sorting. Its innovative design offers a soft breakthrough thanks to its field proven modules and technologies such as real time filed bus, direct drive transmission and many other technical advances.
The G5+ offers fast throughput thanks to the alignment/OCR function embedded on the handling robot. End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through our proprietary ACT (Advanced Contact Technology).
It offers a new benchmark in terms of cleanliness, robustness, flexibility and maintainability. It also provides the highest throughput ever achieved with a single robot, the smallest footprint and unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.
The RECIF Technologies G5+ 300mm Wafer Sorter is providing IC manufacturers the ultimate productivity solution for 10 nm nodes and beyond.
The G5+ sorter offers:
- Advanced PWP front face performance < 0.0049 @ 26nm*
- End effector: 3 points backside Advanced Contact Technology as standard configuration
- New industrial controller
- ISO Class 1 mini-environment
- SEMI300 standards compliant
- 2 or 4 Load Ports configuration
- Integration into stocker (2 or 4 LP)
- Low cost of ownership
- Standard & configurable process programs
- Compatible with all SEMI compliant FOUP/ FOSB types
- Automated hidden time mapping
- New side casing for optional handling features
* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined