Hwaseong-si, Gyeonggi-do, 
Korea (South)
  • Booth: A214


  • Kashiyama Dry Pumps
    Neo Dry Series, SDE Series,MU-X Series,SDL Series...

  • Neo Dry Series

    Small air-cooled dry vacuum pump

    Maintenance cycle ; Once in 3 years!
    No oil smoke, No chamber contamination!
    No Tip-seal replacement, No performance, No particles!
    Hassle free to replace rotary/scroll pump!

    Condensation-prone gas, like water vapor or solvent, available!
    By virtue of inverter,frequency does not affect to performance!
    Low noise,low vibration!

    SDE Series

    Standard type for harsh process(Large Capacity)

    Available up to 200kL/min.

    Best for large wafer adn FPD.

    Durable to various processes.

    MU-X Series

    Roots dry pump achieved smallest energy consumption & footprint in the category.

    Applicable for various tools.

    Best for clean pumping such as L/L and transfer chamber, etc.

    SDL Series

    Available to large size wafer &FPD

    - Large capacity available by combination.

    -Larger than 150kL/min also available dn demand.

    shorter cycle-time

    -Large capacity around atm.pressure can achieve high speed pumping best for large L/L chamber.

    pumps for solvent evacuation are also line-up

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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