KASHIYAMA K TECH CO., LTD. (KKTECH)

Hwaseong-si, Gyeonggi-do, 
Korea (South)
http://www.k-ktech.co.kr
  • Booth: A214

 Products

  • Kashiyama Dry Pumps
    Neo Dry Series, SDE Series,MU-X Series,SDL Series...

    • Neo Dry Series

    Small air-cooled dry vacuum pump

    Maintenance cycle ; Once in 3 years!
    No oil smoke, No chamber contamination!
    No Tip-seal replacement, No performance, No particles!
    Hassle free to replace rotary/scroll pump!
    Condensation-prone gas, like water vapor or solvent, available!
    By virtue of inverter,frequency does not affect to performance!
    Low noise,low vibration!

    SDE Series

    Standard type for harsh process(Large Capacity)

    Available up to 200kL/min.

    Best for large wafer adn FPD.

    Durable to various processes.

    MU-X Series

    Roots dry pump achieved smallest energy consumption & footprint in the category.

    Applicable for various tools.

    Best for clean pumping such as L/L and transfer chamber, etc.

    SDL Series

    Available to large size wafer &FPD

    - Large capacity available by combination.

    -Larger than 150kL/min also available dn demand.

    shorter cycle-time

    -Large capacity around atm.pressure can achieve high speed pumping best for large L/L chamber.

    pumps for solvent evacuation are also line-up

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