New Power Plasma Co., Ltd.

Korea (South)
  • Booth: C356

Thank you for vistiing New power Plasma.

New Power Plasma is offering innovative RF Plasma solutions in semiconductor, FPD, solar cells with creative technical skills.

Our staffs with expertise in RF power and Plasma are developing  and manufacturing RF Generator, Matching Network and Remote Plasma System in high quality, and strive for excellence in customer satisfaction.


  • RPG (Remote Plasma Generator)
    Remote Plasma Generator is a generator producing high density plasma by remote-way for cleaning deposition film inside chamber after CVD process....

  • ■ Features of process

      - Clean accumulated deposits in the chamber with active fluorine radicals

      - Remotely installed from the chamber to minimize damage on the process chamber

      - Available in a wide range of gas flow and output power

      - Available to use EtherCAT communication port

      - Competitive price and low maintenance cost

  • RF Generator & Matcher
    RF Generator & Matcher is a high frequency power supplier, providing with high frequency power in process Chamber to form process plasma at all process equipment (CVD, Dry Etch) in semiconductor and FPD...

  • ■ Features of process

      - Supply high-frequency power to form plasma in the process chamber

      - Available in various frequencies and function

      - Generate high and stable RF power to increase yields in process

      - Competitive price and compact size

      - Implemented a high speed of response

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