RTCK Co., Ltd.

Seoul, 
Korea (South)
http://www.rtck.co.kr
  • Booth: A168


당사는 Pump, Heater, Concentration Meter, Megpie를 취급하고 있습니다.

RTCK Co., Ltd. is supplying the concentration / viscosity meter of Fuji Ultrasonic Engineering for IN-SITU monitoring of checmical(HF,TMAH and so on), Flow Meter of Futurestar corporation, Chemical / DIW Heater of Process Technology, and wafer cleaning system of Prosys Inc. for semiconductor.


 Products

  • FUJI M-13
    M-13 is able to measure concentration of binary liquids (one measurement subject in a base liquid) with ultrasonic propagation velocity principle....

  • - Specifications

    Model name

    FUD-1 Model-13 FUD-1 Model-23(explosion proof model)

    Measurement Parameters

    Ultrasonic propagation speedㆍtemperature

    Display

    LCD (Conc, Temp, Velocity / Various parameters)

    Output

    Analog  DC4~20mA (adjustable for conc. value)

    Digital  RS232C (Conc. Temp. Velocity Error code)

    Alarm  High)ㆍLow limit Error

    Power

    AC100V ~ 240V 50/60Hz 30VA

    Transmitter configuration

    Panel mount type (DIN size)ㆍWall mount type (Rain proof case available)

    Environment

    0~50°C RH85% or less

    Fluid temperature

    0~100°C (Optional -10 ~ 160°C : 100°C span)

    Function

    Output setting, Alarm output setting, Average setting,

    Offset and Gain setting, Self-diagnosis check,

    Fail Safe mode setting, Auto error cancelation setting

    Option

    RS485 output (Alternative choice with RS232C)

    Temperature output (DC4 ~20mA)

    Channel

    Maximum 10ch

    Cable

    10m(standard)  Repeater required for over 10m Max. 300m

    Explosion proof

    Repeater

    Exd[ia]||BT4

    Transducer

    Ex[ia]||CT4

    Transducer material

    SUS316(L)ㆍSUS304(L)ㆍPFA CoatingㆍHastelloyㆍTitaniumㆍ

    NickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

    - Features

    1. In-line / Real time measurement

    2. User-friendly maintenance. In addition, it is possible to check the product condition with its self-diagnostic function

    3. Ultrasonic has a wide range of responses compared to the conductivity rate or refraction rate.

    4. Superior customer service based on over 40 years sales experience

    5. Output systems [Analog, digital, & alarms]

    - Advantages

    1. This product enables real time controlling system easily and the concentration control system is simplified by the concentration output as well as the alarm output and error output on the indicator, recorder and computer.

    2. This product is independent of color, flow rate, and din(sound noise), because it uses ultrasonic.

    3. It does not contaminate the solution, and has an user-friendly maintenance.

      Various transducer materials are available for protection against chemical corrosion.

    SUS316(L)ㆍSUS304(L)ㆍPFA Coating

    HastelloyㆍTitaniumㆍNickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

    - Applications

    Pharmaceutical manufacturing process for the ionic industry : NaOH, NaCI, HCI, NaCIO, etc.

    Chemical plants : H2SO4, HF, TMAH, HNO3, NH4OH, etc

    Steel plate plant : Coolant oil, Oil remover etc

    Synthetic fiber plant : Primary material, Oiling agent etc.

    Food / Beverage plant : Sugar(BX), Ingredients, etc

    Other industries : Cleaner, Etchant, etc

  • FUJI M-53
    M-53 enables to measure the two concentrations in real time by combination technology of two proinciples such as ultrasonic velocity & conductivity....

  • - Specifications

    Model name

    FUD-1 Model-53  FUD-1 Model-63(explosion proof model)

    Measurement Parameters

    Ultrasonic propagation speed, Temperature, Conductivity

    Display

    LCD (Conc.1, conc.2, Temp, Velocity Cond. / Various parameters)

    Output

    Analog  DC4~20mA (2 lines : adjustable for conc. values)

    Digital  RS232C (Conc.1, Conc.2, Temp, Velocity Conductivity Error Code)

    Alarm  High & Low (2 lines) Error

    Power

    AC100V ~ 240V 50/60Hz  30VA

    Transmitter configuration

    Panel mount type (DIN size)

    Environment

    0~50°C RH85% or less

    Fluid temperature

    0~100°C (Optional  -10 ~ 160°C : 100°C span)

    Function

    Output setting, Alarm output setting, Average setting,

    Offset and Gain setting, Self-diagnosis check,

    Auto error cancelation setting, Fail Safe Mode setting

    Option

    RS485 output (Alternative choice with RS232C)

    Temperature output (DC4 ~20mA)

    Channel

    Maximum 7Ch

    Cable

    10m(standard) Repeater required for over 10m. Max. 300m

    Explosion proof

    Repeater

    Exd[ia]||BT4

    Transducer

    Ex[ia]||CT4

    Transducer material

    SUS316(L)ㆍSUS304(L)ㆍPFA CoatingㆍHastelloyㆍTitaniumㆍ

    NickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

    - Features

    1. In-line / Real time measurement

    2. User-friendly maintenance. In addition, it is possible to check the product condition with its self-diagnostic function

    3. Ultrasonic has a wide range of responses compared to the conductivity rate or refraction rate.

    4. Superior customer service based on over 40 years sales experience

    5. Output systems [Analog, digital, & alarms]

    - Advantages

    1. This product enables real time controlling system easily and the concentration control system is simplified by the concentration output as well as the alarm output and error output on the indicator, recorder and computer.

    2. This product is independent of color, flow rate, and din(sound noise), because it uses ultrasonic.

    3. It does not contaminate the solution, and has an user-friendly maintenance.

      Various transducer materials are available for protection against chemical corrosion.

    SUS316(L)ㆍSUS304(L)ㆍPFA Coating

    HastelloyㆍTitaniumㆍNickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

    - Applications

    Acid monitoring at steel cleaning process

    Etching rate control

    Cleaner concentration control e.g.

  • Prosys Megpie
    ProSys Megasonic cleaning systems and transducers provide superior cleaning performance, substantially higher reliability, and a lower cost of ownership for manufacturers of submicron contamination-sensitive products....

  • The MegPie is a single substrate Megasonic Transducer that provides a radial uniform field of acoustic energy incident to the wafer surface. The MegPie can be operated in continuous or pulsed mode and is HF compatible. This megasonic transducer is easily retrofitted in your single substrate cleaning machine or adapted to an OEM tool.

    The MegPie interfaces with the ProSys 200 watt MicroDuo electronics package and is available in 150-300mm package. Custom sizes and materials are available. The ProSys MegPie is electrically more stable than strip or full plate arrays; the result is a more uniform acoustic cavitation field.

    Features & Benefits

    • Particle-neutral sapphire resonator – no particles added to the process
    • Patented crystal bond to the resonator
    • Patented RF connection to the crystal
    • Redundant internal RTD temperature monitoring
    • Available in 100mm to 450mm+
    • Custom sizes available
    • Sapphire resonator compatible with all processing chemistries
    • Uniform direct acoustic energy applied to the process
    • Increased process efficiency
    • Reduced process time
    • Reduced process chemistry usage
    • No moving parts to maintain
    • No consumables – works better than brushes

    Technical Specifications

    • Power density: 0.05 – 2.0 Watts/cm2
    • Standard operating frequency: 925 kHz; other frequencies available on request
    • Mounting height: 0.02? – 0.14? (0.5mm – 3.5mm)
    • Process fluid temperature: 15°C – 60°C
    • Process fluid required depends on the substrate size and RPM: (0.5 – 3.0 lpm)
    • Operating RPM: 1–100
    • Nitrogen or CDA purge: 10 lpm
    • Mounting with 3 x M6 female threaded bosses
    • Use with IMPulse RF electronics

    Processes Supported

    • Post-CMP cleaning
    • TSV
    • Pre-SOIC bond cleaning
    • SU-8 develop
    • Lift off
    • Resist strip
    • Processes Supported • LIGA processes
    • Mask cleaning
    • Etch assist
    • Plating pre-cleaning
    • Pre-plating bubble removal
    • Post-laser cleaning

  • Process Technoloogy Lufran DI Heater
    Process Technology introduces the next generation ultrapure water heater designed for the next generation high purity semiconductor and flat panel display manufacturing processes....

  • Process Technology introduces the next generation ultrapure water heater designed for the next generation high purity semiconductor and flat panel display manufacturing processes. This updated Lufran water heater offers the ultimate in cleanliness for heating UPDI (ultrapure deionized water).

    With thousands of heater installations worldwide, the Lufran boasts proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications. It is constructed with all PTFE and PVDF wetted parts for ultra-low particle count processes. Its patented “purged” resistive element design offers exceptional MTBF of nearly ten years and significantly lower maintenance costs than other ultrapure water heaters on the market.

    This heater is Class 100 cleanroom assembled, certified to SEMI S2/S3, and optionally CE compliant.

    Benefits

    MTBF: 9.39 years

    Temperature: Distributive zero crossing SSR switched by PLC based DAC™ “Demand Anticipation Control” (DAC available on Lufran only).

    Temperature Sensors: “J” type thermocouple (process), “E” type (element over-temperature), or customer specified. Redundant safety features ensure long, trouble-free life.

    Wetted Surfaces:

    Heating elements: continuous virgin PTFE Polytetrafluoroethylene (82%).

    Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%)

    Chemraz® o-rings

    No wetted metal or coated metal parts

    Heating Element: Patented design utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density.

    Element Gas Purge: Removes permeation to extend element life expectancy. Monitors integrity of element tubing.

    Exhaust Ventilation: Not required.

    Standard Features

    DAC™ “Demand Anticipation Control” (run by a PLC, available on LUFRAN only)

    EMO circuit (local and remote)

    Ground fault protection (GFP)

    Fused 24 VAC control circuitry

    Built to UL Standards, SEMI S2/S3, RoHS compliant

    Disconnect

    USB Data logging

    Powder coated cabinet with sump leak detection

    Capacitive liquid level sensor for element protection

    Heater over temp circuit with independent limit control

    Humidity monitor to verify element tubing integrity

    Purge flow switch to verify element purge

    System pressure monitor

    Process high temperature alarm

    PVDF mechanical pressure relief valve set @ 100 PSIG (689.5 kPa)

    Specifications

    Heater: Patented resistive heating system.

    Controller: DAC™ Demand Anticipation Control) for high temperature accuracy.

    Controller: PID

    Sizes: 24kW to 312kW. Voltages: Up to 600 volt (three phase) available. Heaters can be utilized in combination.

    Temperature Limit: 95°C, depending on operating conditions.

    Temperature Accuracy: +/-0.3°C, depending on operating conditions.

    Temperature Accuracy: +/-3°C, depending on operating conditions.

    Flow Rate: 1 LPM (.25 GPM) to 200 LPM (50 GPM).

    Efficiency: 99%

    Pressure Rating: 100 PSIG (6.89 kPa) maximum operating.

    DAC™ DEMAND ANTICIPATION CONTROL Available on Lufran only

    Extremely precise temperature control and stability: Utilizes a patented temperature/flow algorithm to calculate exact

    Required percentage power

    Inlet fluid temperature

    Flow rate

    Actual power applied

    Low temperature boost

    High temperature shut-off

    Quick reacting: Responds instantly to flow changes rather than simply monitoring outlet temperature.

    Better temperature stability: Responds quickly to recipe (flow and temperature) changes.

    Water conservation: Faster heat up and recovery means less water usage.

    Friendly operator interface (User friendly HMI): Touch pad display with easy to understand commands

  • Process Technoloogy PFA Frontier
    The PFA frontier offers higher flow in smaller packaging for a lower price than the others....

  • Offering all fluoropolymer-wetted surfaces, indirect heating, and higher temperature and pressure ratings than the competition,, the PFA frontier is a perfect fit for semiconductor chemical heating applications.

    Benefits

    - Wide range of chemicals available

    - Very low loss pressure, fast reaction time

    - Selectable up to 3KW-24KW

    - Heater structure can be selected according to flow rate

    - No O-ring on the contact area

    - PFA frontier has lower pressure drops/higher flow capacity than any other product in its class

    Specifications

    Preliminary Dimensions

    Wattage

    Overall Length IN(mm)

    Width IN(mm)

    Depth IN(mm)

    3kw

    11.75(299)

    10(254)

    8.25(210)

    6kw

    16.25(413)

    10(254)

    8.25(210)

    9kw

    20.75(527)

    10(254)

    8.25(210)

    12kw

    25.25(641)

    10(254)

    8.25(210)

    18kw

    34.25(870)

    10(254)

    8.25(210)

    24kw

    43.25(1099)

    10(254)

    8.25(210)

  • Process Technoloogy TIH
    The TIH Series In-Line fluordeploymer heater is intended for use in the Western or Single Pass and is designed for chemical applications. The heater heats chemicals from semiconductors, FPDs and MEMS to high purity....

  • -Specifications

    1. Size: 1,000 watts ~ 18,000 watts

    2. Voltage: 200V ~ `600V, Single or three phase(12kW and larger require three phase.)

    3. Watt density: 10 watts per square inch(1.5w/cm2)

    4. Fluid Connections: ¼-inch (6mm) to 1-inch (25mm); ½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar

    5. Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath. Purge minimizes potential for ionic contamination. Removes chemical permeation for longer service life

    -Features

    1. Ruggedly designed for the most demanding recirculation or single pass chemical applications.

    2. Able to achieve the highest temperature heating, up to 210°C.

    3. All fluoropolymer wetted surfaces for virtually any wet chemistry application. Thick walled chamber provides long service life in the harshest high temperature applications.

    4. Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

    5. Certification: CE, UL, Semi S2 and S3

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