ATI Korea Co., Ltd.

Seoul, 
Korea (South)
http://www.atikorea.com
  • Booth: C304


The new experience for advanced instruments and best service

We have supplied the various advanced products and service for semiconductor industry based on our experience and knowledge of the field in Korea since establish in 1994. We also have developed new technology and product for new demands in customer for a fab and on-line of particle size analyzer, particle identification analyzer and chemical concentration monitor.

Full on‐line chemical concentration monitoring allows real time correction of process composition and therefore stable process control; product consistency is maintained. We provide the leading on-­line chemical concentration monitors for formulated cleans, oxidizers in slurries, and water concentration and control in semi-aqueous photoresist strips. In each case, the use of the SemiChem with either monitor chemical quality or extend bath life. In either case, the use of the product can have a significant improvement of overall process cost of ownership.


 Products

  • AccuSizer 780 MiniLE/FX/FX-Nano
    On-Line Particle Sizer & Counter...

  • Size Range: LE 0.56um~400um / FX 0.7um ~ 20um / FX-Nano 0.15um ~ 0.56um

    Channels: 8~512

    Flow Rate: 15ml/min

    Accuracy: 5% of PSL

    Vessel Volume: 13ml dilution flacks

    Stirring: Magnetic

    Sample Port: 1 port

    Wetted Surfaces: Glass, Teflon, Kel-F, Viton (optional Kelrez replacement)

    Applications: Oxide, Metal slurry (Cu, W, Co, Al, Ni), Chemical, etc.

  • SemiChem APMi 200
    Chemical Concentration Monitor...

  • Analysis Method: Potentiometric / Standard Addition / Photometry

    Accuracy: ±2% of Displayed Value

    Precision: ±2% Relative Error

    Measuring Time: About 5 minutes/analysis (Application Dependent)

    Calibration Intervals: At Start-up

    Sample Consumption: less than 5mls/analysis

    Sample Size: 0.05 to 5mls (Application Dependent)

    Sample Temperature: Up to 200℉ (93℃)

    Applications: DSP+, H2O2 in slurry, TMAH, DHF, Metal in chemical

  • SemiChem APMi 200 DSP+ 3comp.
    Chemical Concentration Monitor...

  • Analysis Method: Potentiometric / Standard Addition / Photometry

    Accuracy: ±2% of Displayed Value

    Precision: ±2% Relative Error

    Measuring Time: About 5 minutes/analysis (Application Dependent)

    Calibration Intervals: At Start-up

    Sample Consumption: less than 5mls/analysis

    Sample Size: 0.05 to 5mls (Application Dependent)

    Sample Temperature: Up to 200℉ (93℃)

    Applications: DSP+, H2O2 in slurry, TMAH, DHF, Metal in chemical

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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