Process Technology introduces the next generation ultrapure water heater designed for the next generation high purity semiconductor and flat panel display manufacturing processes. This updated Lufran water heater offers the ultimate in cleanliness for heating UPDI (ultrapure deionized water).
With thousands of heater installations worldwide, the Lufran boasts proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications. It is constructed with all PTFE and PVDF wetted parts for ultra-low particle count processes. Its patented “purged” resistive element design offers exceptional MTBF of nearly ten years and significantly lower maintenance costs than other ultrapure water heaters on the market.
This heater is Class 100 cleanroom assembled, certified to SEMI S2/S3, and optionally CE compliant.
MTBF: 9.39 years
Temperature: Distributive zero crossing SSR switched by PLC based DAC™ “Demand Anticipation Control” (DAC available on Lufran only).
Temperature Sensors: “J” type thermocouple (process), “E” type (element over-temperature), or customer specified. Redundant safety features ensure long, trouble-free life.
Heating elements: continuous virgin PTFE Polytetrafluoroethylene (82%).
Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%)
No wetted metal or coated metal parts
Heating Element: Patented design utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density.
Element Gas Purge: Removes permeation to extend element life expectancy. Monitors integrity of element tubing.
Exhaust Ventilation: Not required.
DAC™ “Demand Anticipation Control” (run by a PLC, available on LUFRAN only)
EMO circuit (local and remote)
Ground fault protection (GFP)
Fused 24 VAC control circuitry
Built to UL Standards, SEMI S2/S3, RoHS compliant
USB Data logging
Powder coated cabinet with sump leak detection
Capacitive liquid level sensor for element protection
Heater over temp circuit with independent limit control
Humidity monitor to verify element tubing integrity
Purge flow switch to verify element purge
System pressure monitor
Process high temperature alarm
PVDF mechanical pressure relief valve set @ 100 PSIG (689.5 kPa)
Heater: Patented resistive heating system.
Controller: DAC™ Demand Anticipation Control) for high temperature accuracy.
Sizes: 24kW to 312kW. Voltages: Up to 600 volt (three phase) available. Heaters can be utilized in combination.
Temperature Limit: 95°C, depending on operating conditions.
Temperature Accuracy: +/-0.3°C, depending on operating conditions.
Temperature Accuracy: +/-3°C, depending on operating conditions.
Flow Rate: 1 LPM (.25 GPM) to 200 LPM (50 GPM).
Pressure Rating: 100 PSIG (6.89 kPa) maximum operating.
DAC™ DEMAND ANTICIPATION CONTROL Available on Lufran only
Extremely precise temperature control and stability: Utilizes a patented temperature/flow algorithm to calculate exact
Required percentage power
Inlet fluid temperature
Actual power applied
Low temperature boost
High temperature shut-off
Quick reacting: Responds instantly to flow changes rather than simply monitoring outlet temperature.
Better temperature stability: Responds quickly to recipe (flow and temperature) changes.
Water conservation: Faster heat up and recovery means less water usage.
Friendly operator interface (User friendly HMI): Touch pad display with easy to understand commands