UB materials Inc.

Yongin-si, Gyeonggi-do, 
Korea (South)
http://www.ubmaterials.com
  • Booth: B510


Aim for the best-in-class company in slurry area for CMP.

UB materials Inc., a Korean company, which is manufacturing CMP slurries for semiconductor use. We are manufacturing Tungsten CMP Slurry ,Poly-Si stop and Nitride-stop slurry. And also developing other slurries for semiconductor devices. We have the state-of-the-art technique for making slurry abrasive and slurry mixing system which was developed by Advanced Semiconductor Materials and Devices Development Center, Hanyang University which has long time successful experience in CMP slurry business field. We are pursuing a Excellent CMP slurry maker on ward and will keep on trying to achieve our Goal.​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​


 Products

  • Tungsten(W) Slurry / Nano Colloidal Ceria Slurry
    Tungsten(W) Slurry - One-step slurry for Line-Hole process. Nano Colloidal Ceria Slurry - High polishing-rate - Scratch decrease. ...

  • 1. 1-step tungsten(W) CMP slurry
        Slurry for tungsten(W) chemical mechanical planarization(CMP) - Including 25nm crystal ZrO2 abrasives - Applications : Formation of Tungsten plug, Tungsten line, Buried tungsten gate etc.

    Primary abrasive size[nm] 25
    Secondary abrasive size[nm] 150
    W polishing rates[Å/min]
    (@ 3 [psi], 90/90 [rpm], 200 [ml/min])
    2500-3000
    SiO2 polishing rates[Å/min]
    (@ 3 [psi], 90/90 [rpm], 200 [ml/min])
    300-400
    Dishing [Å] (@ 40nm BG pattern) 0-10
    Erosion [Å] (@ 40nm BG pattern) 20-6


    2. Nano colloidal ceria slurry
       Slurry for poly-Si stop CMP slurry - slurry for nitride stop CMP slurry - Including CeO2 abrasives by a wet synthesis reaction - Application : shallow trench isolation(STI) CMP process, poly-Si stop CMP process etc.

    Product
    - CeO2 abrasives; 20nm, 40nm, 60nm and 70nm abrasive
    - Scratch less Poly-Si stop CMP slurry
    - Scratch less Nitride stop CMP slurry

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

For Technical Support with this webpage, please contact support.